companies from saxony

HSEB Dresden GmbH
Roth & Rau – Ortner GmbH
SEMPA SYSTEMS GmbH
HeadquartersRoth & Rau - Ortner USA, Inc.
SYSTEMA
HeadquartersSystema USA Corp.
Manfred-von-Ardenne-Ring 4
01099 Dresden - Germany
Phone +49 351 20758-500
Fax
+49 351 20758-890
[email protected]
Internetwww.hseb-dresden.de
Manfred-von-Ardenne-Ring 7
8410 South 700 East
01099 Dresden - GermanySuite 100, Sandy, UT 84070 - USA
Phone +49 351 888610
+1 801 748 0476
Fax
+49 351 8886120
+1 801 748 0158
[email protected]
[email protected]
Internetwww.rr-ortner.com
www.rr-ortner.com
Zur Wetterwarte 50/301
01109 Dresden - Germany
Phone +49 351 88810-0
Fax
+49 351 8881015
[email protected]
Internetwww.sempa.de
Manfred-von-Ardenne-Ring 6
760 SW Madison Suite 104
01099 Dresden - GermanyCorvallis, OR 97333 - USA
Phone +49 351 8824 615
+1 541 602 2092
Fax
+49 351 8824 772
[email protected]
[email protected]
Internetwww.systemagmbh.de
www.systema-usacorp.com
ContactMr. Burkhard Stegemann
ContactMr. Ulrich SpannringMr. Steve Barlow
ContactMr. Kurt Pietsch
ContactMr. Ricco WalterMr. Travis Stevens
HSEB Dresden is a leading supplier of optical inspection systems for the semiconductor and MEMS industry. We develop, design and manufacture automated defect
scanners, semi-automated inspection and review systems, stand-alone microscopes
and OEM components.
In Focus: Factory Automation
SEMPA SYSTEMS GmbH develops, manufactures and distributes globally highest
purity media supply systems and turn-key solutions for bulk gases, speciality gases
and special chemicals to the semiconductor, photovoltaic, printed electronics and
glass fiber industries.
SYSTEMA is a leading provider of software solutions, consulting and support services
for the semiconductor industry, providing system integration with 20 years of experience. Market environments change rapidly and companies need to make sound
decisions to maintain their competitive edge in a global economy. Our product and
service portfolio has a proven track record to significantly reduce TCO, manufacturing
operating cost and to help avoiding capital expenditure.
Our systems allow you to inspect the front and back side and the edge of patterned
and unpatterned wafers in all available diameters and materials available on the
market. Advanced metrology options for CD, VIA and film thickness measurement
and the use of visible, infrared and UV light allow you to detect and image every
defect, every feature, every process deviation you can imagine.
All our tools feature a modular design so that we can tailor them precisely to your
needs, including the option for upgrades if your processes get more demanding over
the time.
"Made in Germany" and "Optics by Carl Zeiss" are your guarantee for maximum
performance, quality and support. In the U.S., HSEB Dresden is represented by
Beam Services, Pleasanton, CA
WE build bridges
The Saxony Economic Development Corporation (SEDC) promotes Saxony
as a business location and advises potential investors on relocation projects.
Furthermore, the SEDC supports Saxon companies in their export efforts
and initiates cooperation with partners outside Saxony.
WE OFFER
• the latest data on Saxony’s economy and business environment,
• customized business site location services,
• procurement of contacts with regional decision makers,
• information on opportunities for financial support and subsidy programs,
• access to branch networks in Saxony,
• assistance in opening up new markets, and
• in initiating cooperative partnerships.
WHAT CAN WE DO FOR YOU?
Saxony Economic Development Corporation
Bertolt-Brecht-Allee 22
01309 Dresden - Germany
Phone +49-351-2138 0
Fax
+49-351-2138 399
[email protected]
Internetwww.wfs.saxony.de
www.invest-in-saxony.com
Roth & Rau - Ortner, founded in 1998, specializes in products, solutions and services
for factory automation in clean room environments, especially in the semiconductor
and photovoltaic industry. The company has three business units:
Automation
We specialize in customized solutions for a safer and more efficient cassette and wafer
handling within different process areas. This includes systems for cassette transportation, storage & identification as well as direct tool loading and wafer handling.
Products
Highly productive and innovative RFID products as well as the realization of
complex RFID projects have been part of our portfolio since 2004.
Installation & Service
We have many years of experience and
in-depth knowledge in the field of installation,
commissioning and maintenance of production
equipment and material handling systems.
DAS Environmental Expert GmbH
Our offering includes: Stainless steel piping systems, bulk gas and specialty gas
distribution systems, specialty chemical distribution and evaporation systems,
metrology for exhaust gas analysis and water vapor permeation rates of ultra barrier
films, contol software and automation of all system solutions, joint development
projects with customers, entire fab solutions, safety concepts, installation and
operation, strong Asian presence via Sempa Asia.
Specific solutions for: TMAl and ozone systems for AIOx backside passivation,
chemical supply systems for IGZO deposition, DEZ distribution systems for ZnO
TCO, chemical distribution solutions for compound semiconductor integration
on silicon… and many more.
Your process improvement
is our mission!
faeth Group
SYSTEMA Experts recommend a set of proven solutions for semiconductor
manufacturing:
•MES Consulting & Migration
•Equipment integration with SYSTEMA EI Suite (SECS, Semi PV02, XML, S7, OPC, etc.)
•End to end system integration – from tool control to ERP
•Full traceability and control capabilites for all manufacturing areas
SYSTEMA trusted partners for MES - traceability & connectivity:
•SAP
•Eyelit
•Cimetrix
profi-con GmbH
contamination control
Goppelner Straße 44
01219 Dresden - Germany
Phone +49 351 40494 000
Fax
+49 351 40494 100
[email protected]
Internet www.das-europe.comContact Mr. Dr. Horst Reichardt
Schwabacher Straße 10
01665 Klipphausen (Dresden) - Germany
Phone +49 35204 3930350
Fax
+49 35204-3930354
[email protected]
Internet www.faethgroup.comContact Mr. Claus Kleilein
Rosa-Luxemburg-Straße 12-14
04103 Leipzig - Germany
Phone +49 341 98989 0
Fax
+49 341 98989 200
[email protected]
Internet www.profi-con.comContact Mr. Frank Duvernell
CLEAN AIR, CLEAN WATER, CLEAN TECHNOLOGY
The companies of the FAETH Group are established as a preferred supplier in the
development and fabrication of ultra-pure media systems and modules for semiconductor, microelectronics and LED industries worldwide. We offer a wide range
of systems for all types of processes involving the supply and disposal of chemicals,
gases, water or slurry. To support OEMs to concentrate on their core business, FAETH
Group also offers the prototyping and volume manufacturing of complete modules.
Founded in 1985, profi-con is a professional service provider for cleanroom cleaning
in the micro- and optoelectronics and automotive industries. profi-con cleans welldefined cleanrooms from airlock inwards to cleanrooms of the highest level. We
are your professional partner in all cleanroom levels. profi-con offers a full-service
system regarding all matters of cleaning. Our staff are well-trained and we keep
them up-to-date by regular trainings.
As pioneer in this market - the range of services is supplemented by the development
and fabrication an of innovative slurry recycling tool. The use of the slurry-recycling
system makes it possible to recycle and reuse 85% of the slurry and 85% of the
DI-water required in the CMP process, making an important contribution to
environmental protection.
In collaboration with our partner, cleanroom-academy, we also offer trainings to teach
your staff about the right behavior in cleanrooms as well as individual consultings
and coachings regarding your specific needs. Furthermore we support our customers
by providing an online cleanroom knowledge base.
At www.cl-ex.com you can find interviews,
educational materials and photos.
DAS Environmental Expert is a leading environmental technology company that
provides sustainable solutions for waste gas abatement and wastewater treatment
while minimizing resource usage. The family-owned, mid-sized business with
headquarters in Dresden, Germany stands out with two decades of technology and
market know-how. Our worldwide employees further develop this knowledge every
day. Every one of them is an Expert in his or her own field. This enables us to offer
products and services that set the highest international standards. That is what we
want to express when we say "Environmental Expert".
companies from saxony
July 9 - 11, semicon west 2013
san francisco, california, usa
moscone center, south Hall, Booth 1831
camLine GmbH
"Silicon Saxony" is Europe’s largest microelectronics cluster and the fifth largest
worldwide. A unique concentration of companies providing extensive knowledge
and expertise in the sectors microelectronics and nanoelectronics, nanotechnology,
organic & printed electronics, energy-efficient systems, next generation communication,
and smart systems is found in the region between Dresden, Freiberg and Chemnitz.
Saxony’s firms are active along all steps of the ICT value creation chain. Approximately 2,100 companies with more than 51,000 employees develop, manufacture,
and promote integrated circuits, or serve as materials and equipment suppliers to
the chip industry, produce and distribute electronic products and systems based on
integrated circuits, or develop and promote software.
Every second chip produced in Europe bears the label "Made in Saxony". GLOBALFOUNDRIES and Infineon Technologies are expanding their Dresden fabs into the
most modern semiconductor production sites to be found anywhere on the globe.
And – "Silicon Saxony" demonstrates its innovative power in various fields: Dresden’s
Novaled AG is the global leader in manufacturing highly efficient and durable OLEDs.
The partners of the leading-edge cluster "Cool Silicon" develop energy efficient ICT
solutions. And the Leipzig-based company bubbles & beyond GmbH
develops intelligent fluids which permit the gentle cleaning
of highly sensitive clean rooms and wafers.
www.invest-in-saxony.com
innolas semiconductor gmbh
Location DresdenFor USA please contact:
HeadquartersFor USA and Canada please contact:
Zur Wetterwarte 50 / Haus 337b
01109 Dresden - Germany
Phone +49 351 890 39 06
Fax
+49 351 890 39 07
[email protected]
Internetwww.httgroup.eu
Headquarters Munich
Merritt Precision Technology, Inc.
Justus-von-Liebig-Ring 8
1080 Classic Road
82152 Krailling - GermanyApex, NC 27539 - USA
Phone +49 89 899 360-1315
+1 (919) 362 7170
Fax
+49 89 899 360-16
+1 (919) 434 6244
[email protected] [email protected]
Internetwww.innolas.com
www.mpt.inc.com
1551 W. Lacewood Place
Phoenix, AZ 85045 - USA
+1 480-363-5071
ContactMr. Heinz Linsmaier
For more than 20 years camLine is known as a solution partner for manufacturing of
high-tech industries. The software company develops and markets its own product
suite LineWorks and the DoE application Cornerstone. In particular with the leading
SPC system LineWorks SPACE, camLine is well-known in semiconductor, electronics,
PV, and medical industries. SPACE is expanding its global market position with
several SPACE add-ons and a series of new chart plug-ins. With Recipe Management
and SQM (Supplier Quality Management) including eCOA (electronic Certificates
of Analyses) LineWorks offers new capabilities that address process security inside
manufacturing and comprehensive quality data management and traceability of
entire modern supply chains.
Manufacturing execution and equipment automation complete the full range of
camLine services that concentrate on strategies to improve quality, process security,
manufacturing efficiency, enterprise-wide production logistics, monitoring &
reporting, and shop floor integration.
ContactMr. Sebastian SimlMr. Christian Noglik
ContactMr. Alexander HofmannMr. Dennis Merritt
HTT Munich/Dresden is a privately owned company founded in 1988, putting its
main focus on the Semiconductor industry. Additionally to that, htt works in the
Photovoltaic & NanoTechnology, Medical Technology, Pharma Industry, Aerospace
and other new areas of high tech industry. HTT offers sales, service, maintenance,
application, CE-EMC confirmity and its own manufactured Cantilever Probecards.
Wafer Marking, Wafer Sorting, Wafer Inspection
Flagship is the WID110 Wafer ID Reader, a new designed RGB-Wafer ID Reader
for OCR, Barcode, DataMatrix Codes designed and built by IOSS in Germany.
Due to its RGB-lighting it is possible to decode even damaged codes from the
wafer surface. The systems have a self-lern-modus, the integration into production
equipment and for OEMs is easy.
InnoLas Semiconductor is a leading developer and manufacturer of high quality wafer laser marking and sorting equipment for the semiconductor and LED industries.
Supported by
Our branches are located worldwide in all important countries of wafer production
including the United States.
InnoLas Semiconductor provides solutions for wafer sizes 2” to 450 mm as well as
all materials and applications using our own laser systems. Typical processes are,
for example, soft or deep marking of semiconductor, compound or LED substrates,
sorting by wafer ID, thickness, weight and macro inspection.
Htt also offers Reader-systems for Reticles,
Glas, medical surgery application.
•Materials: Si, SiC, GaAs, LiTaO3, ceramics, sapphire and others
•Wafer Marking for 2” to 200 mm, 300 mm, 450 mm and customized substrates
•Wafer Sorting for 2” to 200 mm, 300 mm, 450 mm and customized substrates
ATT Systems Gmbh
Silicon Saxony e. V.
Vistec Electron Beam Gmbh
Fraunhoferstraße 11
81545 Muenchen - Germany
Phone +49 89 8994820
Fax
+49 89 89948228
[email protected]
Internet www.att-systems.comContact Mr. Frederik Cheung
Manfred-von-Ardenne-Ring 20
01099 Dresden - Germany
Phone +49 351 892 58 88
Fax
+49 351 892 58 89
[email protected]
Internet www.silicon-saxony.comContact Mrs. Gitta Haupold
Ilmstraße 4
07743 Jena - Germany
Phone +49 3641 7998-0
Fax
+49 3641 7998-222
[email protected]
Internet www.vistec-semi.comContact Mrs. Ines Stolberg
Thermal precision from -70°C to +450°C
NETWORK THINKING – GROWING TOGETHER
With more than 10 years of experience in developing thermal chuck systems for wafer
prober we seek answers required to develop top of the line solutions. Thermal chuck
systems that combine uncompromising performance with exceptional specifications.
Silicon Saxony is Europe's most successful trade association for the semiconductor,
software and photovoltaic industries. We are connecting 300 commercial enterprises,
research institutes, universities and public institutions. The competencies of our
members represent the entire value creation chain of the microelectronics industry.
In addition, the members increasingly enter growing sectors like the photovoltaic
and software industry.
Vistec Electron Beam is providing electron-beam lithography equipment based on
Variable Shaped Beam technology, which is used by leading semiconductor manufacturers and many research institutes around the world. Their innovative electronbeam systems are utilized for microchip production and integrated optics as well as
for advanced research.
Saxon State Ministry for Economic
Affairs, Labour and Transport
Wilhelm-Buck-Straße 2
01097 Dresden - Germany
Phone +49 351 5640
Fax
+49 351 5648068
[email protected]
Internetwww.smwa.sachsen.de
Saxony Economic Development
Corporation
Bertolt-Brecht-Allee 22
01309 Dresden - Germany
Phone +49 351 2138-0
Fax
+49 351 2138-399
[email protected]
Internetwww.wfs.saxony.de
Founded by the State of Saxony, one of the federal states of Germany, the Saxony
Economic Development Corporation (Wirtschaftsförderung Sachsen GmbH) builds
bridges for Saxon companies on their way to the world’s markets and for investors
on their way to Saxony. Successfully.
www.wfs.saxony.de
By focusing on customer satisfaction and technology innovation our products are
designed to be the highest quality in their class and revolutionary in their effect.
Saxony Joint Stand
South Hall, Booth 1831
folsom street
extreme
electronics
SAxony
At this year's Semicon we are presenting
Vistec SB3055 and Vistec SB250.
Our vigorous pursuit of technology is the base of ATT Systems GmbH.
But technology for its own sake has no place in our products.
Our development of innovative systems and materials
is fueled by one goal - to create the best att-chuck
systems for a competitive price.
howard street
www.invest-in-saxony.com/semiconwest
fourth street
Microelectronics / ICT in Saxony
Industriering 4a
85238 Petershausen - Germany
Phone +49 8137 9350
Fax
+49 8137 935 235
[email protected]
Internetwww.camLine.com
HTT High Tech Trade GmbH
Silicon Saxony e. V.
Fraunhofer IZM-ASSID
innolas semiconductor gmbh
Vistec Electron Beam Lithography Group
Headquarters
For USA and Canada please contact:
Vistec Electron Beam GmbH
Vistec Lithography, Inc.
Justus-von-Liebig-Ring 8
82152 Krailling - Germany
Phone +49 89 899 360-1303
Fax
+49 89 899 360-16
[email protected]
Internetwww.innolas.com
Merritt Precision Technology, Inc.
1080 Classic Road
Apex, NC 27539 - USA
+1 (919) 362 7170
+1 (919) 434 6244
[email protected]
www.mpt.inc.com
Goeschwitzer Straße 25
07745 Jena - Germany
Phone +49 3641 651900
Fax
+49 3641 651922
[email protected]
Internetwww.vistec-semi.com
125 Monroe Street
Watervliet, NY 12189 - USA
Contact Mr. Mike Siebert
Dennis Merritt
All Silicon System Integration Dresden
Ringstr. 12
01468 Moritzburg - Germany
Phone +49 351 79557212
Fax
+49 351 79557219
[email protected]
Internetwww.fraunhofer.de/assid
Contact Mrs. Gitta Haupold
Contact Mr. M. Juergen Wolf
NETWORK THINKING – GROWING TOGETHER
Supported by
Saxon State Ministry for Economic
Affairs, Labour and Transport
Wilhelm-Buck-Straße 2
01097 Dresden - Germany
Phone +49 351 5640
Fax
+49 351 5648068
[email protected]
Internetwww.smwa.sachsen.de
Manfred-von-Ardenne-Ring 20
01099 Dresden - Germany
Phone +49 351 892 58 88
Fax
+49 351 892 58 89
[email protected]
Internetwww.silicon-saxony.com
Silicon Saxony is Europe's most successful trade association for the semiconductor,
software and photovoltaic industries. We are connecting 300 commercial enterprises, research institutes, universities and public institutions. The competencies of our
members represent the entire value creation chain of the microelectronics industry.
In addition, the members increasingly enter growing sectors like the photovoltaic
and software industry.
As a continuously growing and vital high-tech network, we understand ourselves
as a communication and cooperation platform for our members. This promotes and
stabilizes the economic development of our member companies. Intelligent partnerships among them enable knowledge transfer, synergies, business relationships and
promote innovative power. Silicon Saxony is open for welcoming members from
any other high-tech fields.
Saxony Economic Development
Corporation
Bertolt-Brecht-Allee 22
01309 Dresden - Germany
Phone +49 351 2138-0
Fax
+49 351 2138-399
[email protected]
Internetwww.wfs.saxony.de
Founded by the State of Saxony, one of the federal states of Germany, the Saxony
Economic Development Corporation (Wirtschaftsförderung Sachsen GmbH) builds
bridges for Saxon companies on their way to the world’s markets and for investors
on their way to Saxony. Successfully.
Fraunhofer Institute for Reliability and Microintegration (IZM) covers together with
its center "All Silicon System Integration Dresden – ASSID" all the competencies
needed for advanced WL packaging and 3D IC and heterogeneous system integration.
IZM-ASSID operates a leading-edge 200/300mm process line for 3D wafer level
system integration which enables industry compatible processing focused on process
development, material and equipment evaluation as well as qualified prototyping
and low volume manufacturing.
Technologies & Services include:
•TSV interposer with multi-layer RDL front and back side
•Qualified high-yield Cu-TSV via-middle/via-last process integration
•High-density and fine pitch interconnect formation
•Thin wafer handling and processing
•Die-to-wafer assembly for 3D stack formation
•Customer-specific prototyping, low-volume manufacturing
Contact Mrs. Ines Stolberg
Wafer Marking, Wafer Sorting, Wafer Inspection
InnoLas Semiconductor is a leading developer and manufacturer of high quality wafer laser marking and sorting equipment for the semiconductor and LED industries.
Our branches are located worldwide in all important countries of wafer production
including the United States.
InnoLas Semiconductor provides solutions for wafer sizes 2” to 450 mm as well as
all materials and applications using our own laser systems. Typical processes are,
for example, soft or deep marking of semiconductor, compound or LED substrates,
sorting by wafer ID or wafer thickness and macro inspection.
•Materials: Si, SiC, GaAs, LiTaO3, ceramics, sapphire and others
•Wafer Marking for 2” to 200 mm, 300 mm, 450 mm and customized substrates
•Wafer Sorting for 2” to 200 mm, 300 mm, 450 mm and customized substrates
South Hall, Booth 1931
extreme
electronics
SAxony
www.invest-in-saxony.com/semiconwest
fourth street
third street
folsom street
At this year's Semicon West the Group
presents Vistec SB3050 Series / SB4050 Series
and SB250.
The Saxony Economic Development Corporation (SEDC) promotes Saxony
as a business location and advises potential investors on relocation projects.
Furthermore, the SEDC supports Saxon companies in their export efforts
and initiates cooperation with partners outside Saxony.
www.wfs.saxony.de
Saxony Joint Stand
The Group consists of two business units: Vistec Electron Beam GmbH, which
produces Variable Shaped Beam systems and Vistec Lithography Inc., which provides
Gaussian Beam systems. In addition to their production facilities in Germany and
the US, the Group also maintains service and support centres in the USA,
Europe and AP.
WE build bridges
camLine GmbH
Industriering 4a
85238 Petershausen - Germany
Phone +49 8137 9350
Fax
+49 8137 935 235
[email protected]
Internet www.camLine.com
The Vistec Electron Beam Lithography Group is a world leader in the design and
manufacture of electron beam lithography systems. The Group provides systems
to both key semiconductor manufacturers as well as Universities and Centres of
Excellence. The application areas span a wide range of existing and emerging
semiconductor and nanotechnology applications including silicon direct write,
compound semiconductor, mask making, advanced research, integrated optics
and several new emerging markets.
WE OFFER
Contact Mr. Heinz Linsmaier
For more than 20 years camLine is known as a solution partner for manufacturing of
high-tech industries. The software company develops and markets its own product
suite LineWorks and the DoE application Cornerstone. In particular with the leading
SPC system LineWorks SPACE, camLine is well-known in semiconductor, electronics,
PV, and medical industries. SPACE is expanding its global market position with
several SPACE add-ons and a series of new chart plug-ins. With Recipe Management
and SQM (Supplier Quality Management) including eCOA (electronic Certificates
of Analyses) LineWorks offers new capabilities that address process security inside
manufacturing and comprehensive quality data management and traceability of
entire modern supply chains.
Manufacturing execution and equipment automation complete the full range of
camLine services that concentrate on strategies to improve quality, process security,
manufacturing efficiency, enterprise-wide
production logistics, monitoring &
reporting, and shop floor integration.
• the latest data on Saxony’s economy and business environment,
• customized business site location services,
• procurement of contacts with regional decision makers,
• information on opportunities for financial support and subsidy programs,
• access to branch networks in Saxony,
• assistance in opening up new markets, and
• in initiating cooperative partnerships.
WHAT CAN WE DO FOR YOU?
Saxony Economic Development Corporation
Bertolt-Brecht-Allee 22
01309 Dresden - Germany
Phone +49-351-2138 0
Fax
+49-351-2138 399
[email protected]
Internetwww.wfs.saxony.de
www.invest-in-saxony.com
companies from saxony
July 10 - 12, semicon west 2012
san francisco, california, usa
moscone center, south Hall, Booth 1931
HSEB Dresden GmbH
Roth & Rau – Ortner GmbH
SEMPA SYSTEMS GmbH
HeadquartersRoth & Rau - Ortner USA, Inc.
SYSTEMA
HeadquartersSystema USA Corp.
Manfred-von-Ardenne-Ring 4
01099 Dresden - Germany
Phone +49 351 20758-500
Fax
+49 351 20758-890
[email protected]
Internetwww.hseb-dresden.de
Manfred-von-Ardenne-Ring 7
8410 South 700 East
01099 Dresden - GermanySuite 100, Sandy, UT 84070 - USA
Phone +49 351 888610
+1 801 748 0476
Fax
+49 351 8886120
+1 801 748 0158
[email protected]
[email protected]
Internetwww.rr-ortner.com
www.rr-ortner.com
Zur Wetterwarte 50/301
01109 Dresden - Germany
Phone +49 351 88810-0
Fax
+49 351 8881015
[email protected]
Internetwww.sempa.de
Manfred-von-Ardenne-Ring 6
760 SW Madison Suite 104
01099 Dresden - GermanyCorvallis, OR 97333 - USA
Phone +49 351 8824 615
+1 541 602 2092
Fax
+49 351 8824 772
[email protected]
[email protected]
Internetwww.systemagmbh.de
www.systema-usacorp.com
ContactMr. Burkhard Stegemann
ContactMr. Ulrich SpannringMr. Steve Barlow
ContactMr. Kurt Pietsch
ContactMr. Ricco WalterMr. Travis Stevens
HSEB Dresden is a leading supplier of optical inspection systems for the semiconductor and MEMS industry. We develop, design and manufacture automated defect
scanners, semi-automated inspection and review systems, stand-alone microscopes
and OEM components.
In Focus: Factory Automation
SEMPA SYSTEMS GmbH develops, manufactures and distributes globally highest
purity media supply systems and turn-key solutions for bulk gases, speciality gases
and special chemicals to the semiconductor, photovoltaic, printed electronics and
glass fiber industries.
SYSTEMA is a leading provider of software solutions, consulting and support services
for the semiconductor industry, providing system integration with 20 years of experience. Market environments change rapidly and companies need to make sound
decisions to maintain their competitive edge in a global economy. Our product and
service portfolio has a proven track record to significantly reduce TCO, manufacturing
operating cost and to help avoiding capital expenditure.
Our systems allow you to inspect the front and back side and the edge of patterned
and unpatterned wafers in all available diameters and materials available on the
market. Advanced metrology options for CD, VIA and film thickness measurement
and the use of visible, infrared and UV light allow you to detect and image every
defect, every feature, every process deviation you can imagine.
All our tools feature a modular design so that we can tailor them precisely to your
needs, including the option for upgrades if your processes get more demanding over
the time.
"Made in Germany" and "Optics by Carl Zeiss" are your guarantee for maximum
performance, quality and support. In the U.S., HSEB Dresden is represented by
Beam Services, Pleasanton, CA
WE build bridges
The Saxony Economic Development Corporation (SEDC) promotes Saxony
as a business location and advises potential investors on relocation projects.
Furthermore, the SEDC supports Saxon companies in their export efforts
and initiates cooperation with partners outside Saxony.
WE OFFER
• the latest data on Saxony’s economy and business environment,
• customized business site location services,
• procurement of contacts with regional decision makers,
• information on opportunities for financial support and subsidy programs,
• access to branch networks in Saxony,
• assistance in opening up new markets, and
• in initiating cooperative partnerships.
WHAT CAN WE DO FOR YOU?
Saxony Economic Development Corporation
Bertolt-Brecht-Allee 22
01309 Dresden - Germany
Phone +49-351-2138 0
Fax
+49-351-2138 399
[email protected]
Internetwww.wfs.saxony.de
www.invest-in-saxony.com
Roth & Rau - Ortner, founded in 1998, specializes in products, solutions and services
for factory automation in clean room environments, especially in the semiconductor
and photovoltaic industry. The company has three business units:
Automation
We specialize in customized solutions for a safer and more efficient cassette and wafer
handling within different process areas. This includes systems for cassette transportation, storage & identification as well as direct tool loading and wafer handling.
Products
Highly productive and innovative RFID products as well as the realization of
complex RFID projects have been part of our portfolio since 2004.
Installation & Service
We have many years of experience and
in-depth knowledge in the field of installation,
commissioning and maintenance of production
equipment and material handling systems.
DAS Environmental Expert GmbH
Our offering includes: Stainless steel piping systems, bulk gas and specialty gas
distribution systems, specialty chemical distribution and evaporation systems,
metrology for exhaust gas analysis and water vapor permeation rates of ultra barrier
films, contol software and automation of all system solutions, joint development
projects with customers, entire fab solutions, safety concepts, installation and
operation, strong Asian presence via Sempa Asia.
Specific solutions for: TMAl and ozone systems for AIOx backside passivation,
chemical supply systems for IGZO deposition, DEZ distribution systems for ZnO
TCO, chemical distribution solutions for compound semiconductor integration
on silicon… and many more.
Your process improvement
is our mission!
faeth Group
SYSTEMA Experts recommend a set of proven solutions for semiconductor
manufacturing:
•MES Consulting & Migration
•Equipment integration with SYSTEMA EI Suite (SECS, Semi PV02, XML, S7, OPC, etc.)
•End to end system integration – from tool control to ERP
•Full traceability and control capabilites for all manufacturing areas
SYSTEMA trusted partners for MES - traceability & connectivity:
•SAP
•Eyelit
•Cimetrix
profi-con GmbH
contamination control
Goppelner Straße 44
01219 Dresden - Germany
Phone +49 351 40494 000
Fax
+49 351 40494 100
[email protected]
Internet www.das-europe.comContact Mr. Dr. Horst Reichardt
Schwabacher Straße 10
01665 Klipphausen (Dresden) - Germany
Phone +49 35204 3930350
Fax
+49 35204-3930354
[email protected]
Internet www.faethgroup.comContact Mr. Claus Kleilein
Rosa-Luxemburg-Straße 12-14
04103 Leipzig - Germany
Phone +49 341 98989 0
Fax
+49 341 98989 200
[email protected]
Internet www.profi-con.comContact Mr. Frank Duvernell
CLEAN AIR, CLEAN WATER, CLEAN TECHNOLOGY
The companies of the FAETH Group are established as a preferred supplier in the
development and fabrication of ultra-pure media systems and modules for semiconductor, microelectronics and LED industries worldwide. We offer a wide range
of systems for all types of processes involving the supply and disposal of chemicals,
gases, water or slurry. To support OEMs to concentrate on their core business, FAETH
Group also offers the prototyping and volume manufacturing of complete modules.
Founded in 1985, profi-con is a professional service provider for cleanroom cleaning
in the micro- and optoelectronics and automotive industries. profi-con cleans welldefined cleanrooms from airlock inwards to cleanrooms of the highest level. We
are your professional partner in all cleanroom levels. profi-con offers a full-service
system regarding all matters of cleaning. Our staff are well-trained and we keep
them up-to-date by regular trainings.
As pioneer in this market - the range of services is supplemented by the development
and fabrication an of innovative slurry recycling tool. The use of the slurry-recycling
system makes it possible to recycle and reuse 85% of the slurry and 85% of the
DI-water required in the CMP process, making an important contribution to
environmental protection.
In collaboration with our partner, cleanroom-academy, we also offer trainings to teach
your staff about the right behavior in cleanrooms as well as individual consultings
and coachings regarding your specific needs. Furthermore we support our customers
by providing an online cleanroom knowledge base.
At www.cl-ex.com you can find interviews,
educational materials and photos.
DAS Environmental Expert is a leading environmental technology company that
provides sustainable solutions for waste gas abatement and wastewater treatment
while minimizing resource usage. The family-owned, mid-sized business with
headquarters in Dresden, Germany stands out with two decades of technology and
market know-how. Our worldwide employees further develop this knowledge every
day. Every one of them is an Expert in his or her own field. This enables us to offer
products and services that set the highest international standards. That is what we
want to express when we say "Environmental Expert".
companies from saxony
July 9 - 11, semicon west 2013
san francisco, california, usa
moscone center, south Hall, Booth 1831
HSEB Dresden GmbH
Roth & Rau – Ortner GmbH
SEMPA SYSTEMS GmbH
HeadquartersRoth & Rau - Ortner USA, Inc.
SYSTEMA
HeadquartersSystema USA Corp.
Manfred-von-Ardenne-Ring 4
01099 Dresden - Germany
Phone +49 351 20758-500
Fax
+49 351 20758-890
[email protected]
Internetwww.hseb-dresden.de
Manfred-von-Ardenne-Ring 7
8410 South 700 East
01099 Dresden - GermanySuite 100, Sandy, UT 84070 - USA
Phone +49 351 888610
+1 801 748 0476
Fax
+49 351 8886120
+1 801 748 0158
[email protected]
[email protected]
Internetwww.rr-ortner.com
www.rr-ortner.com
Zur Wetterwarte 50/301
01109 Dresden - Germany
Phone +49 351 88810-0
Fax
+49 351 8881015
[email protected]
Internetwww.sempa.de
Manfred-von-Ardenne-Ring 6
760 SW Madison Suite 104
01099 Dresden - GermanyCorvallis, OR 97333 - USA
Phone +49 351 8824 615
+1 541 602 2092
Fax
+49 351 8824 772
[email protected]
[email protected]
Internetwww.systemagmbh.de
www.systema-usacorp.com
ContactMr. Burkhard Stegemann
ContactMr. Ulrich SpannringMr. Steve Barlow
ContactMr. Kurt Pietsch
ContactMr. Ricco WalterMr. Travis Stevens
HSEB Dresden is a leading supplier of optical inspection systems for the semiconductor and MEMS industry. We develop, design and manufacture automated defect
scanners, semi-automated inspection and review systems, stand-alone microscopes
and OEM components.
In Focus: Factory Automation
SEMPA SYSTEMS GmbH develops, manufactures and distributes globally highest
purity media supply systems and turn-key solutions for bulk gases, speciality gases
and special chemicals to the semiconductor, photovoltaic, printed electronics and
glass fiber industries.
SYSTEMA is a leading provider of software solutions, consulting and support services
for the semiconductor industry, providing system integration with 20 years of experience. Market environments change rapidly and companies need to make sound
decisions to maintain their competitive edge in a global economy. Our product and
service portfolio has a proven track record to significantly reduce TCO, manufacturing
operating cost and to help avoiding capital expenditure.
Our systems allow you to inspect the front and back side and the edge of patterned
and unpatterned wafers in all available diameters and materials available on the
market. Advanced metrology options for CD, VIA and film thickness measurement
and the use of visible, infrared and UV light allow you to detect and image every
defect, every feature, every process deviation you can imagine.
All our tools feature a modular design so that we can tailor them precisely to your
needs, including the option for upgrades if your processes get more demanding over
the time.
"Made in Germany" and "Optics by Carl Zeiss" are your guarantee for maximum
performance, quality and support. In the U.S., HSEB Dresden is represented by
Beam Services, Pleasanton, CA
WE build bridges
The Saxony Economic Development Corporation (SEDC) promotes Saxony
as a business location and advises potential investors on relocation projects.
Furthermore, the SEDC supports Saxon companies in their export efforts
and initiates cooperation with partners outside Saxony.
WE OFFER
• the latest data on Saxony’s economy and business environment,
• customized business site location services,
• procurement of contacts with regional decision makers,
• information on opportunities for financial support and subsidy programs,
• access to branch networks in Saxony,
• assistance in opening up new markets, and
• in initiating cooperative partnerships.
WHAT CAN WE DO FOR YOU?
Saxony Economic Development Corporation
Bertolt-Brecht-Allee 22
01309 Dresden - Germany
Phone +49-351-2138 0
Fax
+49-351-2138 399
[email protected]
Internetwww.wfs.saxony.de
www.invest-in-saxony.com
Roth & Rau - Ortner, founded in 1998, specializes in products, solutions and services
for factory automation in clean room environments, especially in the semiconductor
and photovoltaic industry. The company has three business units:
Automation
We specialize in customized solutions for a safer and more efficient cassette and wafer
handling within different process areas. This includes systems for cassette transportation, storage & identification as well as direct tool loading and wafer handling.
Products
Highly productive and innovative RFID products as well as the realization of
complex RFID projects have been part of our portfolio since 2004.
Installation & Service
We have many years of experience and
in-depth knowledge in the field of installation,
commissioning and maintenance of production
equipment and material handling systems.
DAS Environmental Expert GmbH
Our offering includes: Stainless steel piping systems, bulk gas and specialty gas
distribution systems, specialty chemical distribution and evaporation systems,
metrology for exhaust gas analysis and water vapor permeation rates of ultra barrier
films, contol software and automation of all system solutions, joint development
projects with customers, entire fab solutions, safety concepts, installation and
operation, strong Asian presence via Sempa Asia.
Specific solutions for: TMAl and ozone systems for AIOx backside passivation,
chemical supply systems for IGZO deposition, DEZ distribution systems for ZnO
TCO, chemical distribution solutions for compound semiconductor integration
on silicon… and many more.
Your process improvement
is our mission!
faeth Group
SYSTEMA Experts recommend a set of proven solutions for semiconductor
manufacturing:
•MES Consulting & Migration
•Equipment integration with SYSTEMA EI Suite (SECS, Semi PV02, XML, S7, OPC, etc.)
•End to end system integration – from tool control to ERP
•Full traceability and control capabilites for all manufacturing areas
SYSTEMA trusted partners for MES - traceability & connectivity:
•SAP
•Eyelit
•Cimetrix
profi-con GmbH
contamination control
Goppelner Straße 44
01219 Dresden - Germany
Phone +49 351 40494 000
Fax
+49 351 40494 100
[email protected]
Internet www.das-europe.comContact Mr. Dr. Horst Reichardt
Schwabacher Straße 10
01665 Klipphausen (Dresden) - Germany
Phone +49 35204 3930350
Fax
+49 35204-3930354
[email protected]
Internet www.faethgroup.comContact Mr. Claus Kleilein
Rosa-Luxemburg-Straße 12-14
04103 Leipzig - Germany
Phone +49 341 98989 0
Fax
+49 341 98989 200
[email protected]
Internet www.profi-con.comContact Mr. Frank Duvernell
CLEAN AIR, CLEAN WATER, CLEAN TECHNOLOGY
The companies of the FAETH Group are established as a preferred supplier in the
development and fabrication of ultra-pure media systems and modules for semiconductor, microelectronics and LED industries worldwide. We offer a wide range
of systems for all types of processes involving the supply and disposal of chemicals,
gases, water or slurry. To support OEMs to concentrate on their core business, FAETH
Group also offers the prototyping and volume manufacturing of complete modules.
Founded in 1985, profi-con is a professional service provider for cleanroom cleaning
in the micro- and optoelectronics and automotive industries. profi-con cleans welldefined cleanrooms from airlock inwards to cleanrooms of the highest level. We
are your professional partner in all cleanroom levels. profi-con offers a full-service
system regarding all matters of cleaning. Our staff are well-trained and we keep
them up-to-date by regular trainings.
As pioneer in this market - the range of services is supplemented by the development
and fabrication an of innovative slurry recycling tool. The use of the slurry-recycling
system makes it possible to recycle and reuse 85% of the slurry and 85% of the
DI-water required in the CMP process, making an important contribution to
environmental protection.
In collaboration with our partner, cleanroom-academy, we also offer trainings to teach
your staff about the right behavior in cleanrooms as well as individual consultings
and coachings regarding your specific needs. Furthermore we support our customers
by providing an online cleanroom knowledge base.
At www.cl-ex.com you can find interviews,
educational materials and photos.
DAS Environmental Expert is a leading environmental technology company that
provides sustainable solutions for waste gas abatement and wastewater treatment
while minimizing resource usage. The family-owned, mid-sized business with
headquarters in Dresden, Germany stands out with two decades of technology and
market know-how. Our worldwide employees further develop this knowledge every
day. Every one of them is an Expert in his or her own field. This enables us to offer
products and services that set the highest international standards. That is what we
want to express when we say "Environmental Expert".
companies from saxony
July 9 - 11, semicon west 2013
san francisco, california, usa
moscone center, south Hall, Booth 1831
HSEB Dresden GmbH
Roth & Rau – Ortner GmbH
SEMPA SYSTEMS GmbH
HeadquartersRoth & Rau - Ortner USA, Inc.
SYSTEMA
HeadquartersSystema USA Corp.
Manfred-von-Ardenne-Ring 4
01099 Dresden - Germany
Phone +49 351 20758-500
Fax
+49 351 20758-890
[email protected]
Internetwww.hseb-dresden.de
Manfred-von-Ardenne-Ring 7
8410 South 700 East
01099 Dresden - GermanySuite 100, Sandy, UT 84070 - USA
Phone +49 351 888610
+1 801 748 0476
Fax
+49 351 8886120
+1 801 748 0158
[email protected]
[email protected]
Internetwww.rr-ortner.com
www.rr-ortner.com
Zur Wetterwarte 50/301
01109 Dresden - Germany
Phone +49 351 88810-0
Fax
+49 351 8881015
[email protected]
Internetwww.sempa.de
Manfred-von-Ardenne-Ring 6
760 SW Madison Suite 104
01099 Dresden - GermanyCorvallis, OR 97333 - USA
Phone +49 351 8824 615
+1 541 602 2092
Fax
+49 351 8824 772
[email protected]
[email protected]
Internetwww.systemagmbh.de
www.systema-usacorp.com
ContactMr. Burkhard Stegemann
ContactMr. Ulrich SpannringMr. Steve Barlow
ContactMr. Kurt Pietsch
ContactMr. Ricco WalterMr. Travis Stevens
HSEB Dresden is a leading supplier of optical inspection systems for the semiconductor and MEMS industry. We develop, design and manufacture automated defect
scanners, semi-automated inspection and review systems, stand-alone microscopes
and OEM components.
In Focus: Factory Automation
SEMPA SYSTEMS GmbH develops, manufactures and distributes globally highest
purity media supply systems and turn-key solutions for bulk gases, speciality gases
and special chemicals to the semiconductor, photovoltaic, printed electronics and
glass fiber industries.
SYSTEMA is a leading provider of software solutions, consulting and support services
for the semiconductor industry, providing system integration with 20 years of experience. Market environments change rapidly and companies need to make sound
decisions to maintain their competitive edge in a global economy. Our product and
service portfolio has a proven track record to significantly reduce TCO, manufacturing
operating cost and to help avoiding capital expenditure.
Our systems allow you to inspect the front and back side and the edge of patterned
and unpatterned wafers in all available diameters and materials available on the
market. Advanced metrology options for CD, VIA and film thickness measurement
and the use of visible, infrared and UV light allow you to detect and image every
defect, every feature, every process deviation you can imagine.
All our tools feature a modular design so that we can tailor them precisely to your
needs, including the option for upgrades if your processes get more demanding over
the time.
"Made in Germany" and "Optics by Carl Zeiss" are your guarantee for maximum
performance, quality and support. In the U.S., HSEB Dresden is represented by
Beam Services, Pleasanton, CA
WE build bridges
The Saxony Economic Development Corporation (SEDC) promotes Saxony
as a business location and advises potential investors on relocation projects.
Furthermore, the SEDC supports Saxon companies in their export efforts
and initiates cooperation with partners outside Saxony.
WE OFFER
• the latest data on Saxony’s economy and business environment,
• customized business site location services,
• procurement of contacts with regional decision makers,
• information on opportunities for financial support and subsidy programs,
• access to branch networks in Saxony,
• assistance in opening up new markets, and
• in initiating cooperative partnerships.
WHAT CAN WE DO FOR YOU?
Saxony Economic Development Corporation
Bertolt-Brecht-Allee 22
01309 Dresden - Germany
Phone +49-351-2138 0
Fax
+49-351-2138 399
[email protected]
Internetwww.wfs.saxony.de
www.invest-in-saxony.com
Roth & Rau - Ortner, founded in 1998, specializes in products, solutions and services
for factory automation in clean room environments, especially in the semiconductor
and photovoltaic industry. The company has three business units:
Automation
We specialize in customized solutions for a safer and more efficient cassette and wafer
handling within different process areas. This includes systems for cassette transportation, storage & identification as well as direct tool loading and wafer handling.
Products
Highly productive and innovative RFID products as well as the realization of
complex RFID projects have been part of our portfolio since 2004.
Installation & Service
We have many years of experience and
in-depth knowledge in the field of installation,
commissioning and maintenance of production
equipment and material handling systems.
DAS Environmental Expert GmbH
Our offering includes: Stainless steel piping systems, bulk gas and specialty gas
distribution systems, specialty chemical distribution and evaporation systems,
metrology for exhaust gas analysis and water vapor permeation rates of ultra barrier
films, contol software and automation of all system solutions, joint development
projects with customers, entire fab solutions, safety concepts, installation and
operation, strong Asian presence via Sempa Asia.
Specific solutions for: TMAl and ozone systems for AIOx backside passivation,
chemical supply systems for IGZO deposition, DEZ distribution systems for ZnO
TCO, chemical distribution solutions for compound semiconductor integration
on silicon… and many more.
Your process improvement
is our mission!
faeth Group
SYSTEMA Experts recommend a set of proven solutions for semiconductor
manufacturing:
•MES Consulting & Migration
•Equipment integration with SYSTEMA EI Suite (SECS, Semi PV02, XML, S7, OPC, etc.)
•End to end system integration – from tool control to ERP
•Full traceability and control capabilites for all manufacturing areas
SYSTEMA trusted partners for MES - traceability & connectivity:
•SAP
•Eyelit
•Cimetrix
profi-con GmbH
contamination control
Goppelner Straße 44
01219 Dresden - Germany
Phone +49 351 40494 000
Fax
+49 351 40494 100
[email protected]
Internet www.das-europe.comContact Mr. Dr. Horst Reichardt
Schwabacher Straße 10
01665 Klipphausen (Dresden) - Germany
Phone +49 35204 3930350
Fax
+49 35204-3930354
[email protected]
Internet www.faethgroup.comContact Mr. Claus Kleilein
Rosa-Luxemburg-Straße 12-14
04103 Leipzig - Germany
Phone +49 341 98989 0
Fax
+49 341 98989 200
[email protected]
Internet www.profi-con.comContact Mr. Frank Duvernell
CLEAN AIR, CLEAN WATER, CLEAN TECHNOLOGY
The companies of the FAETH Group are established as a preferred supplier in the
development and fabrication of ultra-pure media systems and modules for semiconductor, microelectronics and LED industries worldwide. We offer a wide range
of systems for all types of processes involving the supply and disposal of chemicals,
gases, water or slurry. To support OEMs to concentrate on their core business, FAETH
Group also offers the prototyping and volume manufacturing of complete modules.
Founded in 1985, profi-con is a professional service provider for cleanroom cleaning
in the micro- and optoelectronics and automotive industries. profi-con cleans welldefined cleanrooms from airlock inwards to cleanrooms of the highest level. We
are your professional partner in all cleanroom levels. profi-con offers a full-service
system regarding all matters of cleaning. Our staff are well-trained and we keep
them up-to-date by regular trainings.
As pioneer in this market - the range of services is supplemented by the development
and fabrication an of innovative slurry recycling tool. The use of the slurry-recycling
system makes it possible to recycle and reuse 85% of the slurry and 85% of the
DI-water required in the CMP process, making an important contribution to
environmental protection.
In collaboration with our partner, cleanroom-academy, we also offer trainings to teach
your staff about the right behavior in cleanrooms as well as individual consultings
and coachings regarding your specific needs. Furthermore we support our customers
by providing an online cleanroom knowledge base.
At www.cl-ex.com you can find interviews,
educational materials and photos.
DAS Environmental Expert is a leading environmental technology company that
provides sustainable solutions for waste gas abatement and wastewater treatment
while minimizing resource usage. The family-owned, mid-sized business with
headquarters in Dresden, Germany stands out with two decades of technology and
market know-how. Our worldwide employees further develop this knowledge every
day. Every one of them is an Expert in his or her own field. This enables us to offer
products and services that set the highest international standards. That is what we
want to express when we say "Environmental Expert".
companies from saxony
July 9 - 11, semicon west 2013
san francisco, california, usa
moscone center, south Hall, Booth 1831
HSEB Dresden GmbH
Roth & Rau – Ortner GmbH
SEMPA SYSTEMS GmbH
HeadquartersRoth & Rau - Ortner USA, Inc.
SYSTEMA
HeadquartersSystema USA Corp.
Manfred-von-Ardenne-Ring 4
01099 Dresden - Germany
Phone +49 351 20758-500
Fax
+49 351 20758-890
[email protected]
Internetwww.hseb-dresden.de
Manfred-von-Ardenne-Ring 7
8410 South 700 East
01099 Dresden - GermanySuite 100, Sandy, UT 84070 - USA
Phone +49 351 888610
+1 801 748 0476
Fax
+49 351 8886120
+1 801 748 0158
[email protected]
[email protected]
Internetwww.rr-ortner.com
www.rr-ortner.com
Zur Wetterwarte 50/301
01109 Dresden - Germany
Phone +49 351 88810-0
Fax
+49 351 8881015
[email protected]
Internetwww.sempa.de
Manfred-von-Ardenne-Ring 6
760 SW Madison Suite 104
01099 Dresden - GermanyCorvallis, OR 97333 - USA
Phone +49 351 8824 615
+1 541 602 2092
Fax
+49 351 8824 772
[email protected]
[email protected]
Internetwww.systemagmbh.de
www.systema-usacorp.com
ContactMr. Burkhard Stegemann
ContactMr. Ulrich SpannringMr. Steve Barlow
ContactMr. Kurt Pietsch
ContactMr. Ricco WalterMr. Travis Stevens
HSEB Dresden is a leading supplier of optical inspection systems for the semiconductor and MEMS industry. We develop, design and manufacture automated defect
scanners, semi-automated inspection and review systems, stand-alone microscopes
and OEM components.
In Focus: Factory Automation
SEMPA SYSTEMS GmbH develops, manufactures and distributes globally highest
purity media supply systems and turn-key solutions for bulk gases, speciality gases
and special chemicals to the semiconductor, photovoltaic, printed electronics and
glass fiber industries.
SYSTEMA is a leading provider of software solutions, consulting and support services
for the semiconductor industry, providing system integration with 20 years of experience. Market environments change rapidly and companies need to make sound
decisions to maintain their competitive edge in a global economy. Our product and
service portfolio has a proven track record to significantly reduce TCO, manufacturing
operating cost and to help avoiding capital expenditure.
Our systems allow you to inspect the front and back side and the edge of patterned
and unpatterned wafers in all available diameters and materials available on the
market. Advanced metrology options for CD, VIA and film thickness measurement
and the use of visible, infrared and UV light allow you to detect and image every
defect, every feature, every process deviation you can imagine.
All our tools feature a modular design so that we can tailor them precisely to your
needs, including the option for upgrades if your processes get more demanding over
the time.
"Made in Germany" and "Optics by Carl Zeiss" are your guarantee for maximum
performance, quality and support. In the U.S., HSEB Dresden is represented by
Beam Services, Pleasanton, CA
WE build bridges
The Saxony Economic Development Corporation (SEDC) promotes Saxony
as a business location and advises potential investors on relocation projects.
Furthermore, the SEDC supports Saxon companies in their export efforts
and initiates cooperation with partners outside Saxony.
WE OFFER
• the latest data on Saxony’s economy and business environment,
• customized business site location services,
• procurement of contacts with regional decision makers,
• information on opportunities for financial support and subsidy programs,
• access to branch networks in Saxony,
• assistance in opening up new markets, and
• in initiating cooperative partnerships.
WHAT CAN WE DO FOR YOU?
Saxony Economic Development Corporation
Bertolt-Brecht-Allee 22
01309 Dresden - Germany
Phone +49-351-2138 0
Fax
+49-351-2138 399
[email protected]
Internetwww.wfs.saxony.de
www.invest-in-saxony.com
Roth & Rau - Ortner, founded in 1998, specializes in products, solutions and services
for factory automation in clean room environments, especially in the semiconductor
and photovoltaic industry. The company has three business units:
Automation
We specialize in customized solutions for a safer and more efficient cassette and wafer
handling within different process areas. This includes systems for cassette transportation, storage & identification as well as direct tool loading and wafer handling.
Products
Highly productive and innovative RFID products as well as the realization of
complex RFID projects have been part of our portfolio since 2004.
Installation & Service
We have many years of experience and
in-depth knowledge in the field of installation,
commissioning and maintenance of production
equipment and material handling systems.
DAS Environmental Expert GmbH
Our offering includes: Stainless steel piping systems, bulk gas and specialty gas
distribution systems, specialty chemical distribution and evaporation systems,
metrology for exhaust gas analysis and water vapor permeation rates of ultra barrier
films, contol software and automation of all system solutions, joint development
projects with customers, entire fab solutions, safety concepts, installation and
operation, strong Asian presence via Sempa Asia.
Specific solutions for: TMAl and ozone systems for AIOx backside passivation,
chemical supply systems for IGZO deposition, DEZ distribution systems for ZnO
TCO, chemical distribution solutions for compound semiconductor integration
on silicon… and many more.
Your process improvement
is our mission!
faeth Group
SYSTEMA Experts recommend a set of proven solutions for semiconductor
manufacturing:
•MES Consulting & Migration
•Equipment integration with SYSTEMA EI Suite (SECS, Semi PV02, XML, S7, OPC, etc.)
•End to end system integration – from tool control to ERP
•Full traceability and control capabilites for all manufacturing areas
SYSTEMA trusted partners for MES - traceability & connectivity:
•SAP
•Eyelit
•Cimetrix
profi-con GmbH
contamination control
Goppelner Straße 44
01219 Dresden - Germany
Phone +49 351 40494 000
Fax
+49 351 40494 100
[email protected]
Internet www.das-europe.comContact Mr. Dr. Horst Reichardt
Schwabacher Straße 10
01665 Klipphausen (Dresden) - Germany
Phone +49 35204 3930350
Fax
+49 35204-3930354
[email protected]
Internet www.faethgroup.comContact Mr. Claus Kleilein
Rosa-Luxemburg-Straße 12-14
04103 Leipzig - Germany
Phone +49 341 98989 0
Fax
+49 341 98989 200
[email protected]
Internet www.profi-con.comContact Mr. Frank Duvernell
CLEAN AIR, CLEAN WATER, CLEAN TECHNOLOGY
The companies of the FAETH Group are established as a preferred supplier in the
development and fabrication of ultra-pure media systems and modules for semiconductor, microelectronics and LED industries worldwide. We offer a wide range
of systems for all types of processes involving the supply and disposal of chemicals,
gases, water or slurry. To support OEMs to concentrate on their core business, FAETH
Group also offers the prototyping and volume manufacturing of complete modules.
Founded in 1985, profi-con is a professional service provider for cleanroom cleaning
in the micro- and optoelectronics and automotive industries. profi-con cleans welldefined cleanrooms from airlock inwards to cleanrooms of the highest level. We
are your professional partner in all cleanroom levels. profi-con offers a full-service
system regarding all matters of cleaning. Our staff are well-trained and we keep
them up-to-date by regular trainings.
As pioneer in this market - the range of services is supplemented by the development
and fabrication an of innovative slurry recycling tool. The use of the slurry-recycling
system makes it possible to recycle and reuse 85% of the slurry and 85% of the
DI-water required in the CMP process, making an important contribution to
environmental protection.
In collaboration with our partner, cleanroom-academy, we also offer trainings to teach
your staff about the right behavior in cleanrooms as well as individual consultings
and coachings regarding your specific needs. Furthermore we support our customers
by providing an online cleanroom knowledge base.
At www.cl-ex.com you can find interviews,
educational materials and photos.
DAS Environmental Expert is a leading environmental technology company that
provides sustainable solutions for waste gas abatement and wastewater treatment
while minimizing resource usage. The family-owned, mid-sized business with
headquarters in Dresden, Germany stands out with two decades of technology and
market know-how. Our worldwide employees further develop this knowledge every
day. Every one of them is an Expert in his or her own field. This enables us to offer
products and services that set the highest international standards. That is what we
want to express when we say "Environmental Expert".
companies from saxony
July 9 - 11, semicon west 2013
san francisco, california, usa
moscone center, south Hall, Booth 1831
camLine GmbH
"Silicon Saxony" is Europe’s largest microelectronics cluster and the fifth largest
worldwide. A unique concentration of companies providing extensive knowledge
and expertise in the sectors microelectronics and nanoelectronics, nanotechnology,
organic & printed electronics, energy-efficient systems, next generation communication,
and smart systems is found in the region between Dresden, Freiberg and Chemnitz.
Saxony’s firms are active along all steps of the ICT value creation chain. Approximately 2,100 companies with more than 51,000 employees develop, manufacture,
and promote integrated circuits, or serve as materials and equipment suppliers to
the chip industry, produce and distribute electronic products and systems based on
integrated circuits, or develop and promote software.
Every second chip produced in Europe bears the label "Made in Saxony". GLOBALFOUNDRIES and Infineon Technologies are expanding their Dresden fabs into the
most modern semiconductor production sites to be found anywhere on the globe.
And – "Silicon Saxony" demonstrates its innovative power in various fields: Dresden’s
Novaled AG is the global leader in manufacturing highly efficient and durable OLEDs.
The partners of the leading-edge cluster "Cool Silicon" develop energy efficient ICT
solutions. And the Leipzig-based company bubbles & beyond GmbH
develops intelligent fluids which permit the gentle cleaning
of highly sensitive clean rooms and wafers.
www.invest-in-saxony.com
innolas semiconductor gmbh
Location DresdenFor USA please contact:
HeadquartersFor USA and Canada please contact:
Zur Wetterwarte 50 / Haus 337b
01109 Dresden - Germany
Phone +49 351 890 39 06
Fax
+49 351 890 39 07
[email protected]
Internetwww.httgroup.eu
Headquarters Munich
Merritt Precision Technology, Inc.
Justus-von-Liebig-Ring 8
1080 Classic Road
82152 Krailling - GermanyApex, NC 27539 - USA
Phone +49 89 899 360-1315
+1 (919) 362 7170
Fax
+49 89 899 360-16
+1 (919) 434 6244
[email protected] [email protected]
Internetwww.innolas.com
www.mpt.inc.com
1551 W. Lacewood Place
Phoenix, AZ 85045 - USA
+1 480-363-5071
ContactMr. Heinz Linsmaier
For more than 20 years camLine is known as a solution partner for manufacturing of
high-tech industries. The software company develops and markets its own product
suite LineWorks and the DoE application Cornerstone. In particular with the leading
SPC system LineWorks SPACE, camLine is well-known in semiconductor, electronics,
PV, and medical industries. SPACE is expanding its global market position with
several SPACE add-ons and a series of new chart plug-ins. With Recipe Management
and SQM (Supplier Quality Management) including eCOA (electronic Certificates
of Analyses) LineWorks offers new capabilities that address process security inside
manufacturing and comprehensive quality data management and traceability of
entire modern supply chains.
Manufacturing execution and equipment automation complete the full range of
camLine services that concentrate on strategies to improve quality, process security,
manufacturing efficiency, enterprise-wide production logistics, monitoring &
reporting, and shop floor integration.
ContactMr. Sebastian SimlMr. Christian Noglik
ContactMr. Alexander HofmannMr. Dennis Merritt
HTT Munich/Dresden is a privately owned company founded in 1988, putting its
main focus on the Semiconductor industry. Additionally to that, htt works in the
Photovoltaic & NanoTechnology, Medical Technology, Pharma Industry, Aerospace
and other new areas of high tech industry. HTT offers sales, service, maintenance,
application, CE-EMC confirmity and its own manufactured Cantilever Probecards.
Wafer Marking, Wafer Sorting, Wafer Inspection
Flagship is the WID110 Wafer ID Reader, a new designed RGB-Wafer ID Reader
for OCR, Barcode, DataMatrix Codes designed and built by IOSS in Germany.
Due to its RGB-lighting it is possible to decode even damaged codes from the
wafer surface. The systems have a self-lern-modus, the integration into production
equipment and for OEMs is easy.
InnoLas Semiconductor is a leading developer and manufacturer of high quality wafer laser marking and sorting equipment for the semiconductor and LED industries.
Supported by
Our branches are located worldwide in all important countries of wafer production
including the United States.
InnoLas Semiconductor provides solutions for wafer sizes 2” to 450 mm as well as
all materials and applications using our own laser systems. Typical processes are,
for example, soft or deep marking of semiconductor, compound or LED substrates,
sorting by wafer ID, thickness, weight and macro inspection.
Htt also offers Reader-systems for Reticles,
Glas, medical surgery application.
•Materials: Si, SiC, GaAs, LiTaO3, ceramics, sapphire and others
•Wafer Marking for 2” to 200 mm, 300 mm, 450 mm and customized substrates
•Wafer Sorting for 2” to 200 mm, 300 mm, 450 mm and customized substrates
ATT Systems Gmbh
Silicon Saxony e. V.
Vistec Electron Beam Gmbh
Fraunhoferstraße 11
81545 Muenchen - Germany
Phone +49 89 8994820
Fax
+49 89 89948228
[email protected]
Internet www.att-systems.comContact Mr. Frederik Cheung
Manfred-von-Ardenne-Ring 20
01099 Dresden - Germany
Phone +49 351 892 58 88
Fax
+49 351 892 58 89
[email protected]
Internet www.silicon-saxony.comContact Mrs. Gitta Haupold
Ilmstraße 4
07743 Jena - Germany
Phone +49 3641 7998-0
Fax
+49 3641 7998-222
[email protected]
Internet www.vistec-semi.comContact Mrs. Ines Stolberg
Thermal precision from -70°C to +450°C
NETWORK THINKING – GROWING TOGETHER
With more than 10 years of experience in developing thermal chuck systems for wafer
prober we seek answers required to develop top of the line solutions. Thermal chuck
systems that combine uncompromising performance with exceptional specifications.
Silicon Saxony is Europe's most successful trade association for the semiconductor,
software and photovoltaic industries. We are connecting 300 commercial enterprises,
research institutes, universities and public institutions. The competencies of our
members represent the entire value creation chain of the microelectronics industry.
In addition, the members increasingly enter growing sectors like the photovoltaic
and software industry.
Vistec Electron Beam is providing electron-beam lithography equipment based on
Variable Shaped Beam technology, which is used by leading semiconductor manufacturers and many research institutes around the world. Their innovative electronbeam systems are utilized for microchip production and integrated optics as well as
for advanced research.
Saxon State Ministry for Economic
Affairs, Labour and Transport
Wilhelm-Buck-Straße 2
01097 Dresden - Germany
Phone +49 351 5640
Fax
+49 351 5648068
[email protected]
Internetwww.smwa.sachsen.de
Saxony Economic Development
Corporation
Bertolt-Brecht-Allee 22
01309 Dresden - Germany
Phone +49 351 2138-0
Fax
+49 351 2138-399
[email protected]
Internetwww.wfs.saxony.de
Founded by the State of Saxony, one of the federal states of Germany, the Saxony
Economic Development Corporation (Wirtschaftsförderung Sachsen GmbH) builds
bridges for Saxon companies on their way to the world’s markets and for investors
on their way to Saxony. Successfully.
www.wfs.saxony.de
By focusing on customer satisfaction and technology innovation our products are
designed to be the highest quality in their class and revolutionary in their effect.
Saxony Joint Stand
South Hall, Booth 1831
folsom street
extreme
electronics
SAxony
At this year's Semicon we are presenting
Vistec SB3055 and Vistec SB250.
Our vigorous pursuit of technology is the base of ATT Systems GmbH.
But technology for its own sake has no place in our products.
Our development of innovative systems and materials
is fueled by one goal - to create the best att-chuck
systems for a competitive price.
howard street
www.invest-in-saxony.com/semiconwest
fourth street
Microelectronics / ICT in Saxony
Industriering 4a
85238 Petershausen - Germany
Phone +49 8137 9350
Fax
+49 8137 935 235
[email protected]
Internetwww.camLine.com
HTT High Tech Trade GmbH
camLine GmbH
"Silicon Saxony" is Europe’s largest microelectronics cluster and the fifth largest
worldwide. A unique concentration of companies providing extensive knowledge
and expertise in the sectors microelectronics and nanoelectronics, nanotechnology,
organic & printed electronics, energy-efficient systems, next generation communication,
and smart systems is found in the region between Dresden, Freiberg and Chemnitz.
Saxony’s firms are active along all steps of the ICT value creation chain. Approximately 2,100 companies with more than 51,000 employees develop, manufacture,
and promote integrated circuits, or serve as materials and equipment suppliers to
the chip industry, produce and distribute electronic products and systems based on
integrated circuits, or develop and promote software.
Every second chip produced in Europe bears the label "Made in Saxony". GLOBALFOUNDRIES and Infineon Technologies are expanding their Dresden fabs into the
most modern semiconductor production sites to be found anywhere on the globe.
And – "Silicon Saxony" demonstrates its innovative power in various fields: Dresden’s
Novaled AG is the global leader in manufacturing highly efficient and durable OLEDs.
The partners of the leading-edge cluster "Cool Silicon" develop energy efficient ICT
solutions. And the Leipzig-based company bubbles & beyond GmbH
develops intelligent fluids which permit the gentle cleaning
of highly sensitive clean rooms and wafers.
www.invest-in-saxony.com
innolas semiconductor gmbh
Location DresdenFor USA please contact:
HeadquartersFor USA and Canada please contact:
Zur Wetterwarte 50 / Haus 337b
01109 Dresden - Germany
Phone +49 351 890 39 06
Fax
+49 351 890 39 07
[email protected]
Internetwww.httgroup.eu
Headquarters Munich
Merritt Precision Technology, Inc.
Justus-von-Liebig-Ring 8
1080 Classic Road
82152 Krailling - GermanyApex, NC 27539 - USA
Phone +49 89 899 360-1315
+1 (919) 362 7170
Fax
+49 89 899 360-16
+1 (919) 434 6244
[email protected] [email protected]
Internetwww.innolas.com
www.mpt.inc.com
1551 W. Lacewood Place
Phoenix, AZ 85045 - USA
+1 480-363-5071
ContactMr. Heinz Linsmaier
For more than 20 years camLine is known as a solution partner for manufacturing of
high-tech industries. The software company develops and markets its own product
suite LineWorks and the DoE application Cornerstone. In particular with the leading
SPC system LineWorks SPACE, camLine is well-known in semiconductor, electronics,
PV, and medical industries. SPACE is expanding its global market position with
several SPACE add-ons and a series of new chart plug-ins. With Recipe Management
and SQM (Supplier Quality Management) including eCOA (electronic Certificates
of Analyses) LineWorks offers new capabilities that address process security inside
manufacturing and comprehensive quality data management and traceability of
entire modern supply chains.
Manufacturing execution and equipment automation complete the full range of
camLine services that concentrate on strategies to improve quality, process security,
manufacturing efficiency, enterprise-wide production logistics, monitoring &
reporting, and shop floor integration.
ContactMr. Sebastian SimlMr. Christian Noglik
ContactMr. Alexander HofmannMr. Dennis Merritt
HTT Munich/Dresden is a privately owned company founded in 1988, putting its
main focus on the Semiconductor industry. Additionally to that, htt works in the
Photovoltaic & NanoTechnology, Medical Technology, Pharma Industry, Aerospace
and other new areas of high tech industry. HTT offers sales, service, maintenance,
application, CE-EMC confirmity and its own manufactured Cantilever Probecards.
Wafer Marking, Wafer Sorting, Wafer Inspection
Flagship is the WID110 Wafer ID Reader, a new designed RGB-Wafer ID Reader
for OCR, Barcode, DataMatrix Codes designed and built by IOSS in Germany.
Due to its RGB-lighting it is possible to decode even damaged codes from the
wafer surface. The systems have a self-lern-modus, the integration into production
equipment and for OEMs is easy.
InnoLas Semiconductor is a leading developer and manufacturer of high quality wafer laser marking and sorting equipment for the semiconductor and LED industries.
Supported by
Our branches are located worldwide in all important countries of wafer production
including the United States.
InnoLas Semiconductor provides solutions for wafer sizes 2” to 450 mm as well as
all materials and applications using our own laser systems. Typical processes are,
for example, soft or deep marking of semiconductor, compound or LED substrates,
sorting by wafer ID, thickness, weight and macro inspection.
Htt also offers Reader-systems for Reticles,
Glas, medical surgery application.
•Materials: Si, SiC, GaAs, LiTaO3, ceramics, sapphire and others
•Wafer Marking for 2” to 200 mm, 300 mm, 450 mm and customized substrates
•Wafer Sorting for 2” to 200 mm, 300 mm, 450 mm and customized substrates
ATT Systems Gmbh
Silicon Saxony e. V.
Vistec Electron Beam Gmbh
Fraunhoferstraße 11
81545 Muenchen - Germany
Phone +49 89 8994820
Fax
+49 89 89948228
[email protected]
Internet www.att-systems.comContact Mr. Frederik Cheung
Manfred-von-Ardenne-Ring 20
01099 Dresden - Germany
Phone +49 351 892 58 88
Fax
+49 351 892 58 89
[email protected]
Internet www.silicon-saxony.comContact Mrs. Gitta Haupold
Ilmstraße 4
07743 Jena - Germany
Phone +49 3641 7998-0
Fax
+49 3641 7998-222
[email protected]
Internet www.vistec-semi.comContact Mrs. Ines Stolberg
Thermal precision from -70°C to +450°C
NETWORK THINKING – GROWING TOGETHER
With more than 10 years of experience in developing thermal chuck systems for wafer
prober we seek answers required to develop top of the line solutions. Thermal chuck
systems that combine uncompromising performance with exceptional specifications.
Silicon Saxony is Europe's most successful trade association for the semiconductor,
software and photovoltaic industries. We are connecting 300 commercial enterprises,
research institutes, universities and public institutions. The competencies of our
members represent the entire value creation chain of the microelectronics industry.
In addition, the members increasingly enter growing sectors like the photovoltaic
and software industry.
Vistec Electron Beam is providing electron-beam lithography equipment based on
Variable Shaped Beam technology, which is used by leading semiconductor manufacturers and many research institutes around the world. Their innovative electronbeam systems are utilized for microchip production and integrated optics as well as
for advanced research.
Saxon State Ministry for Economic
Affairs, Labour and Transport
Wilhelm-Buck-Straße 2
01097 Dresden - Germany
Phone +49 351 5640
Fax
+49 351 5648068
[email protected]
Internetwww.smwa.sachsen.de
Saxony Economic Development
Corporation
Bertolt-Brecht-Allee 22
01309 Dresden - Germany
Phone +49 351 2138-0
Fax
+49 351 2138-399
[email protected]
Internetwww.wfs.saxony.de
Founded by the State of Saxony, one of the federal states of Germany, the Saxony
Economic Development Corporation (Wirtschaftsförderung Sachsen GmbH) builds
bridges for Saxon companies on their way to the world’s markets and for investors
on their way to Saxony. Successfully.
www.wfs.saxony.de
By focusing on customer satisfaction and technology innovation our products are
designed to be the highest quality in their class and revolutionary in their effect.
Saxony Joint Stand
South Hall, Booth 1831
folsom street
extreme
electronics
SAxony
At this year's Semicon we are presenting
Vistec SB3055 and Vistec SB250.
Our vigorous pursuit of technology is the base of ATT Systems GmbH.
But technology for its own sake has no place in our products.
Our development of innovative systems and materials
is fueled by one goal - to create the best att-chuck
systems for a competitive price.
howard street
www.invest-in-saxony.com/semiconwest
fourth street
Microelectronics / ICT in Saxony
Industriering 4a
85238 Petershausen - Germany
Phone +49 8137 9350
Fax
+49 8137 935 235
[email protected]
Internetwww.camLine.com
HTT High Tech Trade GmbH
camLine GmbH
"Silicon Saxony" is Europe’s largest microelectronics cluster and the fifth largest
worldwide. A unique concentration of companies providing extensive knowledge
and expertise in the sectors microelectronics and nanoelectronics, nanotechnology,
organic & printed electronics, energy-efficient systems, next generation communication,
and smart systems is found in the region between Dresden, Freiberg and Chemnitz.
Saxony’s firms are active along all steps of the ICT value creation chain. Approximately 2,100 companies with more than 51,000 employees develop, manufacture,
and promote integrated circuits, or serve as materials and equipment suppliers to
the chip industry, produce and distribute electronic products and systems based on
integrated circuits, or develop and promote software.
Every second chip produced in Europe bears the label "Made in Saxony". GLOBALFOUNDRIES and Infineon Technologies are expanding their Dresden fabs into the
most modern semiconductor production sites to be found anywhere on the globe.
And – "Silicon Saxony" demonstrates its innovative power in various fields: Dresden’s
Novaled AG is the global leader in manufacturing highly efficient and durable OLEDs.
The partners of the leading-edge cluster "Cool Silicon" develop energy efficient ICT
solutions. And the Leipzig-based company bubbles & beyond GmbH
develops intelligent fluids which permit the gentle cleaning
of highly sensitive clean rooms and wafers.
www.invest-in-saxony.com
innolas semiconductor gmbh
Location DresdenFor USA please contact:
HeadquartersFor USA and Canada please contact:
Zur Wetterwarte 50 / Haus 337b
01109 Dresden - Germany
Phone +49 351 890 39 06
Fax
+49 351 890 39 07
[email protected]
Internetwww.httgroup.eu
Headquarters Munich
Merritt Precision Technology, Inc.
Justus-von-Liebig-Ring 8
1080 Classic Road
82152 Krailling - GermanyApex, NC 27539 - USA
Phone +49 89 899 360-1315
+1 (919) 362 7170
Fax
+49 89 899 360-16
+1 (919) 434 6244
[email protected] [email protected]
Internetwww.innolas.com
www.mpt.inc.com
1551 W. Lacewood Place
Phoenix, AZ 85045 - USA
+1 480-363-5071
ContactMr. Heinz Linsmaier
For more than 20 years camLine is known as a solution partner for manufacturing of
high-tech industries. The software company develops and markets its own product
suite LineWorks and the DoE application Cornerstone. In particular with the leading
SPC system LineWorks SPACE, camLine is well-known in semiconductor, electronics,
PV, and medical industries. SPACE is expanding its global market position with
several SPACE add-ons and a series of new chart plug-ins. With Recipe Management
and SQM (Supplier Quality Management) including eCOA (electronic Certificates
of Analyses) LineWorks offers new capabilities that address process security inside
manufacturing and comprehensive quality data management and traceability of
entire modern supply chains.
Manufacturing execution and equipment automation complete the full range of
camLine services that concentrate on strategies to improve quality, process security,
manufacturing efficiency, enterprise-wide production logistics, monitoring &
reporting, and shop floor integration.
ContactMr. Sebastian SimlMr. Christian Noglik
ContactMr. Alexander HofmannMr. Dennis Merritt
HTT Munich/Dresden is a privately owned company founded in 1988, putting its
main focus on the Semiconductor industry. Additionally to that, htt works in the
Photovoltaic & NanoTechnology, Medical Technology, Pharma Industry, Aerospace
and other new areas of high tech industry. HTT offers sales, service, maintenance,
application, CE-EMC confirmity and its own manufactured Cantilever Probecards.
Wafer Marking, Wafer Sorting, Wafer Inspection
Flagship is the WID110 Wafer ID Reader, a new designed RGB-Wafer ID Reader
for OCR, Barcode, DataMatrix Codes designed and built by IOSS in Germany.
Due to its RGB-lighting it is possible to decode even damaged codes from the
wafer surface. The systems have a self-lern-modus, the integration into production
equipment and for OEMs is easy.
InnoLas Semiconductor is a leading developer and manufacturer of high quality wafer laser marking and sorting equipment for the semiconductor and LED industries.
Supported by
Our branches are located worldwide in all important countries of wafer production
including the United States.
InnoLas Semiconductor provides solutions for wafer sizes 2” to 450 mm as well as
all materials and applications using our own laser systems. Typical processes are,
for example, soft or deep marking of semiconductor, compound or LED substrates,
sorting by wafer ID, thickness, weight and macro inspection.
Htt also offers Reader-systems for Reticles,
Glas, medical surgery application.
•Materials: Si, SiC, GaAs, LiTaO3, ceramics, sapphire and others
•Wafer Marking for 2” to 200 mm, 300 mm, 450 mm and customized substrates
•Wafer Sorting for 2” to 200 mm, 300 mm, 450 mm and customized substrates
ATT Systems Gmbh
Silicon Saxony e. V.
Vistec Electron Beam Gmbh
Fraunhoferstraße 11
81545 Muenchen - Germany
Phone +49 89 8994820
Fax
+49 89 89948228
[email protected]
Internet www.att-systems.comContact Mr. Frederik Cheung
Manfred-von-Ardenne-Ring 20
01099 Dresden - Germany
Phone +49 351 892 58 88
Fax
+49 351 892 58 89
[email protected]
Internet www.silicon-saxony.comContact Mrs. Gitta Haupold
Ilmstraße 4
07743 Jena - Germany
Phone +49 3641 7998-0
Fax
+49 3641 7998-222
[email protected]
Internet www.vistec-semi.comContact Mrs. Ines Stolberg
Thermal precision from -70°C to +450°C
NETWORK THINKING – GROWING TOGETHER
With more than 10 years of experience in developing thermal chuck systems for wafer
prober we seek answers required to develop top of the line solutions. Thermal chuck
systems that combine uncompromising performance with exceptional specifications.
Silicon Saxony is Europe's most successful trade association for the semiconductor,
software and photovoltaic industries. We are connecting 300 commercial enterprises,
research institutes, universities and public institutions. The competencies of our
members represent the entire value creation chain of the microelectronics industry.
In addition, the members increasingly enter growing sectors like the photovoltaic
and software industry.
Vistec Electron Beam is providing electron-beam lithography equipment based on
Variable Shaped Beam technology, which is used by leading semiconductor manufacturers and many research institutes around the world. Their innovative electronbeam systems are utilized for microchip production and integrated optics as well as
for advanced research.
Saxon State Ministry for Economic
Affairs, Labour and Transport
Wilhelm-Buck-Straße 2
01097 Dresden - Germany
Phone +49 351 5640
Fax
+49 351 5648068
[email protected]
Internetwww.smwa.sachsen.de
Saxony Economic Development
Corporation
Bertolt-Brecht-Allee 22
01309 Dresden - Germany
Phone +49 351 2138-0
Fax
+49 351 2138-399
[email protected]
Internetwww.wfs.saxony.de
Founded by the State of Saxony, one of the federal states of Germany, the Saxony
Economic Development Corporation (Wirtschaftsförderung Sachsen GmbH) builds
bridges for Saxon companies on their way to the world’s markets and for investors
on their way to Saxony. Successfully.
www.wfs.saxony.de
By focusing on customer satisfaction and technology innovation our products are
designed to be the highest quality in their class and revolutionary in their effect.
Saxony Joint Stand
South Hall, Booth 1831
folsom street
extreme
electronics
SAxony
At this year's Semicon we are presenting
Vistec SB3055 and Vistec SB250.
Our vigorous pursuit of technology is the base of ATT Systems GmbH.
But technology for its own sake has no place in our products.
Our development of innovative systems and materials
is fueled by one goal - to create the best att-chuck
systems for a competitive price.
howard street
www.invest-in-saxony.com/semiconwest
fourth street
Microelectronics / ICT in Saxony
Industriering 4a
85238 Petershausen - Germany
Phone +49 8137 9350
Fax
+49 8137 935 235
[email protected]
Internetwww.camLine.com
HTT High Tech Trade GmbH
camLine GmbH
"Silicon Saxony" is Europe’s largest microelectronics cluster and the fifth largest
worldwide. A unique concentration of companies providing extensive knowledge
and expertise in the sectors microelectronics and nanoelectronics, nanotechnology,
organic & printed electronics, energy-efficient systems, next generation communication,
and smart systems is found in the region between Dresden, Freiberg and Chemnitz.
Saxony’s firms are active along all steps of the ICT value creation chain. Approximately 2,100 companies with more than 51,000 employees develop, manufacture,
and promote integrated circuits, or serve as materials and equipment suppliers to
the chip industry, produce and distribute electronic products and systems based on
integrated circuits, or develop and promote software.
Every second chip produced in Europe bears the label "Made in Saxony". GLOBALFOUNDRIES and Infineon Technologies are expanding their Dresden fabs into the
most modern semiconductor production sites to be found anywhere on the globe.
And – "Silicon Saxony" demonstrates its innovative power in various fields: Dresden’s
Novaled AG is the global leader in manufacturing highly efficient and durable OLEDs.
The partners of the leading-edge cluster "Cool Silicon" develop energy efficient ICT
solutions. And the Leipzig-based company bubbles & beyond GmbH
develops intelligent fluids which permit the gentle cleaning
of highly sensitive clean rooms and wafers.
www.invest-in-saxony.com
innolas semiconductor gmbh
Location DresdenFor USA please contact:
HeadquartersFor USA and Canada please contact:
Zur Wetterwarte 50 / Haus 337b
01109 Dresden - Germany
Phone +49 351 890 39 06
Fax
+49 351 890 39 07
[email protected]
Internetwww.httgroup.eu
Headquarters Munich
Merritt Precision Technology, Inc.
Justus-von-Liebig-Ring 8
1080 Classic Road
82152 Krailling - GermanyApex, NC 27539 - USA
Phone +49 89 899 360-1315
+1 (919) 362 7170
Fax
+49 89 899 360-16
+1 (919) 434 6244
[email protected] [email protected]
Internetwww.innolas.com
www.mpt.inc.com
1551 W. Lacewood Place
Phoenix, AZ 85045 - USA
+1 480-363-5071
ContactMr. Heinz Linsmaier
For more than 20 years camLine is known as a solution partner for manufacturing of
high-tech industries. The software company develops and markets its own product
suite LineWorks and the DoE application Cornerstone. In particular with the leading
SPC system LineWorks SPACE, camLine is well-known in semiconductor, electronics,
PV, and medical industries. SPACE is expanding its global market position with
several SPACE add-ons and a series of new chart plug-ins. With Recipe Management
and SQM (Supplier Quality Management) including eCOA (electronic Certificates
of Analyses) LineWorks offers new capabilities that address process security inside
manufacturing and comprehensive quality data management and traceability of
entire modern supply chains.
Manufacturing execution and equipment automation complete the full range of
camLine services that concentrate on strategies to improve quality, process security,
manufacturing efficiency, enterprise-wide production logistics, monitoring &
reporting, and shop floor integration.
ContactMr. Sebastian SimlMr. Christian Noglik
ContactMr. Alexander HofmannMr. Dennis Merritt
HTT Munich/Dresden is a privately owned company founded in 1988, putting its
main focus on the Semiconductor industry. Additionally to that, htt works in the
Photovoltaic & NanoTechnology, Medical Technology, Pharma Industry, Aerospace
and other new areas of high tech industry. HTT offers sales, service, maintenance,
application, CE-EMC confirmity and its own manufactured Cantilever Probecards.
Wafer Marking, Wafer Sorting, Wafer Inspection
Flagship is the WID110 Wafer ID Reader, a new designed RGB-Wafer ID Reader
for OCR, Barcode, DataMatrix Codes designed and built by IOSS in Germany.
Due to its RGB-lighting it is possible to decode even damaged codes from the
wafer surface. The systems have a self-lern-modus, the integration into production
equipment and for OEMs is easy.
InnoLas Semiconductor is a leading developer and manufacturer of high quality wafer laser marking and sorting equipment for the semiconductor and LED industries.
Supported by
Our branches are located worldwide in all important countries of wafer production
including the United States.
InnoLas Semiconductor provides solutions for wafer sizes 2” to 450 mm as well as
all materials and applications using our own laser systems. Typical processes are,
for example, soft or deep marking of semiconductor, compound or LED substrates,
sorting by wafer ID, thickness, weight and macro inspection.
Htt also offers Reader-systems for Reticles,
Glas, medical surgery application.
•Materials: Si, SiC, GaAs, LiTaO3, ceramics, sapphire and others
•Wafer Marking for 2” to 200 mm, 300 mm, 450 mm and customized substrates
•Wafer Sorting for 2” to 200 mm, 300 mm, 450 mm and customized substrates
ATT Systems Gmbh
Silicon Saxony e. V.
Vistec Electron Beam Gmbh
Fraunhoferstraße 11
81545 Muenchen - Germany
Phone +49 89 8994820
Fax
+49 89 89948228
[email protected]
Internet www.att-systems.comContact Mr. Frederik Cheung
Manfred-von-Ardenne-Ring 20
01099 Dresden - Germany
Phone +49 351 892 58 88
Fax
+49 351 892 58 89
[email protected]
Internet www.silicon-saxony.comContact Mrs. Gitta Haupold
Ilmstraße 4
07743 Jena - Germany
Phone +49 3641 7998-0
Fax
+49 3641 7998-222
[email protected]
Internet www.vistec-semi.comContact Mrs. Ines Stolberg
Thermal precision from -70°C to +450°C
NETWORK THINKING – GROWING TOGETHER
With more than 10 years of experience in developing thermal chuck systems for wafer
prober we seek answers required to develop top of the line solutions. Thermal chuck
systems that combine uncompromising performance with exceptional specifications.
Silicon Saxony is Europe's most successful trade association for the semiconductor,
software and photovoltaic industries. We are connecting 300 commercial enterprises,
research institutes, universities and public institutions. The competencies of our
members represent the entire value creation chain of the microelectronics industry.
In addition, the members increasingly enter growing sectors like the photovoltaic
and software industry.
Vistec Electron Beam is providing electron-beam lithography equipment based on
Variable Shaped Beam technology, which is used by leading semiconductor manufacturers and many research institutes around the world. Their innovative electronbeam systems are utilized for microchip production and integrated optics as well as
for advanced research.
Saxon State Ministry for Economic
Affairs, Labour and Transport
Wilhelm-Buck-Straße 2
01097 Dresden - Germany
Phone +49 351 5640
Fax
+49 351 5648068
[email protected]
Internetwww.smwa.sachsen.de
Saxony Economic Development
Corporation
Bertolt-Brecht-Allee 22
01309 Dresden - Germany
Phone +49 351 2138-0
Fax
+49 351 2138-399
[email protected]
Internetwww.wfs.saxony.de
Founded by the State of Saxony, one of the federal states of Germany, the Saxony
Economic Development Corporation (Wirtschaftsförderung Sachsen GmbH) builds
bridges for Saxon companies on their way to the world’s markets and for investors
on their way to Saxony. Successfully.
www.wfs.saxony.de
By focusing on customer satisfaction and technology innovation our products are
designed to be the highest quality in their class and revolutionary in their effect.
Saxony Joint Stand
South Hall, Booth 1831
folsom street
extreme
electronics
SAxony
At this year's Semicon we are presenting
Vistec SB3055 and Vistec SB250.
Our vigorous pursuit of technology is the base of ATT Systems GmbH.
But technology for its own sake has no place in our products.
Our development of innovative systems and materials
is fueled by one goal - to create the best att-chuck
systems for a competitive price.
howard street
www.invest-in-saxony.com/semiconwest
fourth street
Microelectronics / ICT in Saxony
Industriering 4a
85238 Petershausen - Germany
Phone +49 8137 9350
Fax
+49 8137 935 235
[email protected]
Internetwww.camLine.com
HTT High Tech Trade GmbH