KUKA AWSM 3800.6 AdVANCEd WIRE SAW MACHINE

KUKA Energy Solutions
KUKA AWSM 3800.6
AdVANCEd WIRE SAW MACHINE
KUKA AWSM 3800.6
AdVANCED WIRE SAW MACHINE
AWSM 3800.6 is a fully automatic three wire guide saw
machine for slicing hard and expensive materials such as
ingots of Silicon, Germanium, GaAs, InP and other AIII-BV or
AII-BVI materials, glass, ceramics, ferrites etc. into wafers.
The design of the machines utilizes advanced methods for
improving stability parameters and long service life of the parts
subjected to higher stress (bearings, shafts, wire guide etc.).
The lifetime of the parts is twelve months at minimum.
FEATURES AND BENEFITS
UTILITY
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High performance at low operating costs
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High quality of wafer surface
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Long and large (14” or 2 x 156 mm) diameter ingots
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Fully programmable control
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Oil, glycol or water* based slurry
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(inclusion etc.)
Electric power 3 + N + PE, 3 x 400 V / 230 V,
50 Hz, consumption 65 kVA
Compressed air
0.6 MPa, maximum
consumption 670 l/min
Cooling water
Closed cooling system – 50kW
(can be connected to external
cooling system) Dimensions Weight
Approx. 4800 x 2100 x 3500 mm
(width x height x depth)
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Low use of consumables
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Remote diagnostics
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Closed cooling circuits
SPECIFICATIONS
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Loading and unloading device
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Customized technology
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Custom-defined table feed rate and slurry flow profiles
Ingot diameter (max.):
Ingot length (max.):
Maximum wire speed:
Table feed rate: Wire tension:
Wire length: Wire diameter: Production capacity (example)
Capacity is determined by the length and diameter of
the ingot, desired thickness of wafers, diameter of wire,
speed of plate motion (slicing speed) and preparatory time for starting of the machine.
-Ingot:
PSQ 125*125 / 156 mm, 800 mm lengths
-Thickness of wafers: 200 µm
-Example result: 4507 wafers per run
-Example result:
P = 695 wafers per hour
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*as option
Specifications regarding the characteristics and usability of the products do not constitute a
warranty of properties. They are intended to serve informative purposes only. Some items of
equipment depicted in the illustrations are optional, and are not included in the standard scope
of supply. Solely the respective contract of sale shall be binding in respect of the extent of
our supplies.
KUKA Systems GmbH
Bluecherstrasse 144 l 86165 Augsburg l Germany
Tel. + 49 821 797-0 l Fax + 49 821 797-1991
[email protected] l www.kuka-systems.com
International
Benelux l Brazil l China l Czech Republic l France l Germany
India l Mexico l Norway l Russia l Slovakia l Sweden l UK l USA
Approx. 14 400 kg
1 x 405 mm or 2 x 156 mm
2 x 800 mm up to ø 156 mm
1 x 800 mm for larger diameter
14 m/sec
2 - 9999 µm/min
15 - 43 N
Up to 600 km
120 - 220 µm
For more details contact us at [email protected]
or call + 49 821 797-1076.
WM.-Nr. 996121/1003/AWSM3800.6/2e
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