SmarAct will design a mechanical NSOM probe holder.

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1. reference marks.
According to the current quote your system will be equipped with distance coded reference marks. This
will ensure that the positioners only travel a minimum distance during referencing. Please also see the
attached file (SmarAct_ReferenceMarks_2013_10.pdf) for more information.
2. Wave length of the nanosensor LED.
The LED operates in the near-infrared spectrum with a wave length of 870nm.
3. resolution and bidirectional repeatability of the rotary positioners.
The rotary positioners SR-5714-S for example exhibitx a resolution of 15 µ°. The repeatability should
be somewhere arround 300 µ°.
4. Repeatability of the aperture of the iris diaphragms. For example our SID-5714 Iris diaphragm offers
an iris, which can be fully closed. The iris daiphragm is driven by our SR-5714-S rotary positioner,
which offers a repeatability of approx. 300 µ°. This would correspond to a repeatability of the aperture
of 70 µm. But since the iris diaphragm itself has a certain play and backlash, the repeatability might be
a little bit worse. We do not have reliable data on this.
5. Occurring vibrations
Due to the Stick-Slip principle vibrations might occur, which are induced by macroscopic steps of the
actuator during the stepping mode. For SmarAct drives a typical step size is about 1µm, which means
that every 1µm a short mechanical impulse is coupled into the system, which e.g. can cause a short
vibration.
By modifying the driving signal, SmarAct was able to reduce these vibrations to a minimum without
changing the hardware. The Low vibration feature is available as simple software update for most MCS
systems and allows to use SmarAct SLC stages for long smooth movements over long distances. This
update costs 500,- EUR for a 3 channel controller.
During the scan mode no vibrations are induced.
At the moment we do not have reliable data on the vibrations I could show you.
6. Please find attached some information on our optomechanical products as well as our grippers. You
can also find more information in our current catalog, which you can download at
http://www.smaract.de/index.php/catalogue
The really tiny gripper from FemtoTools, which you saw during your visit, can be found at
http://www.femtotools.com/index.php?id=products-g
The gripper can be controlled via our controllers. They will be equipped with a special end-effector
board.
(2) Ferrovac, Dectris
(i) With Ferrovac
Topics
1. Sample stage for 15D manipulator
2. Motorization of sample transfer system
1. Sample Stage
The different aspects, experimental conditions, limits and parameters of the sample stage were
discussed.
A summary of the preliminairy specification can be found here: Preliminairy Specification July 14th,
2014
Roadmap
▪
▪
▪
▪
▪
▪
▪
▪
▪
Prepare quote for NSRRC (through Amao): Urs, until 21st of July
Review and add to / modify specsheet: James Ku, until end of July
Initiate ordering process: James Ku, until mid of August
CAD design and engineering phase: September - December 2014
Clearance of final drafts: January 2015
Procurement of parts and components, lead time: January February 2015
Material complete, ready for assembly: March 2015
Assembly and factory tests (if applicable): March 2015
Delivery: April 2015.
2. Motorization of sample transfer system
The manipulators of the load lock and sample preparation system will be fully motorized. Ferrovac will
prepare a quote for this system. Linear drive units are allready available, rotational modules are
presently designed and added to the range of products. REMARK: The rear end of the horizontally
mounted sample transporters MUST be supported by bars attached to the frame. We will add this
option to the quote.
Roadmap
▪ Prepare quote for NSRRC (through Amao): Urs, until 21st of July
▪ Review and add to / modify specsheet: James Ku, until end of July
▪ Initiate ordering process: James Ku, until mid of August
▪ CAD design and engineering phase: September - December 2014
▪ Clearance of final drafts: January 2015
▪ Procurement of parts and components, lead time: January February 2015
▪ Material complete, ready for assembly: March 2015
▪ Assembly and factory tests: March 2015
Delivery: April 2015.
(ii) With Ferrovac & Dectris
1. Vacuum implementation and Z-shift mechanics for 6M detector
James Ku explains the reason for the Z position adjustment: Increased resoultion & beter solid angle.
3. Z-Travel should be 240mm
4. The lateral deviation over the full Z-range should be < 1 pixel =^ 172 micron.
5. Vertical resolution: ~1mm
6. Travel range:
7. +65mm down
8. -175mm up
9. measured from flange face.
10.
Detector Footprint: 420 x 430mm
11.
Detector weight 92kg
12.
Beam height: 1350mm
13.
maximum height of System: 2600mm
14.
flange height of detector: 1790mm from ground level
Cost envelope: < 100 kCHF
The Orsay Physics SEM column can operate at pressures up to 10E-5mbar
Pumpdown time: <24h
Delivery delay: detector chamber and translation mechanics: May 2015
How can evaporation / contamination of the detector be avoided?
Use a Kapton / mylar foil of 12 micron thickness as a protecting “shield”.
Z-Translation:
▪ Encoder: Rotary on motor or gearbox
▪ Endswitches mandatory
A viewport should be provided so that the position of the detector can be seen.
The detector is sensitive to visible light.
REMARK: The planned turbo pumping speed of 300 lt / s is to my opinion not enough to achieve 10E6 mbar within a reasonable amount of time. (<24h)
Roadmap
▪ Dr Ku provides lates CAD model of endstaion in Step format
▪ Dectris will prepare a budgetary quote
▪ Dectris will come up with a realistic schedule
Ferrovac will be consultant for question regarding vacuum issues
Participants
James Ku (NSRRC), Christoph Rass (SmarAct), Björn Kaemena
(SmarAct)
Topcis
1. SmarPod
• It is still uncertain which forces are needed to bend the cold
cooper braid from the cryostat.
• NSRRC will install a mechanical safety feature (e.g. a linear
translation stage) in order to make sure the SmarPod and the
cryostat are moved at the same speed. This linear translation
stage also enables large travels in Y direction (parallel to Xray beam). Therefore, the SmarPod does not need to be able
to travel 20cm in Y direction.
• An easy to use quick release fastener system will be designed in
order to exchange the 17D manipulator on the SmarPod with
a third party (user) stage.
• The SmarPod needs to be able to carry a maximum load of 1.5kg.
• Sample transfer: Ferrovac's transfer rod, which carries the sample
holder, will stop at a safe position. The SmarPod will be used
in order to perform the last part of the transfer !(sample holder
is inserted into sample receiver).
2.
17D manipulator
•
thermocouples need to be attached to the 3D stages (17D
manipulator) in order to monitor the temperature of
the positioning system
•
All 3D stages and the SmarAct sample stage need to be
designed in order to allow a quick exchange (spare
parts). Use 3D manipulators with a baseplate. The
cables will not go through the 17D manipulator base
plate. They will just be attached to the base plate by
a clamp in order to allow a quick exchange.
•
What is the exact weight of the Ferrovac sample stage?
Use increased blocking force for the sample stage
positioners or consider the use of constant force
springs.
•
The needed measurement resolution is 50nm.
•
STM 3D stages will be used to electrically contact
different domains on the sample !surface (e.g.
graphene domains).
3.
STM tip holder, DAXM profiler and NSOM probe holder
•
STM tip holder will be designed with a width of 3mm
and rounded edges. The hole for the STM tip will be
as small as possible (maximum 1mm in diameter).
•
NSRRC will find out if there is a possibility to get a
special shaped Pt profiler, which can be attached to
the Akiyama probe holder, for the DAXM
measurement.
•
SmarAct will design a mechanical NSOM probe holder.
•
SmarAct will not provide any electrical cabling.
4.
•
Time frame
SmarAct will receive purchase order from NSRRC by
mid of August 2014.
•
CAD design and engineering phase: August - September
2014
1.
SmarPod
2.
17D manipulator,
3.
STM tip holder, DAXM profiler and NSOM probe holder
4.
time frame
5.
3D manipulators from order SRPO-1030206 (AB041400249)
• design approval: October 2014
• manufacturing of the complete system: December 2014 –
January 2015
• Delivery: February 2015
5. 3D manipulators from order SRPO-1030206 (AB041400249)
• SmarAct will receive an updated purchase order from NSRRC's
purchasing department, which includes the upgrade of the
MCS control system to the 19” rack version.
• Delivery: September 2014
• SmarAct will provide a manual on how to disassemble the holder
for the STM tip holder !and the Akiyama probe holder, which
is connected to the SLC-1730 linear axes.
!
Version: 1
Complete System Specification
Save date: 07/21/2014
Customer NSRRC
Project
SmarPod and 17D Manipulator
Document History
Version (Status)
Date
Author
Change Description
1.0
06.02.2014
Björn Kaemena
Initial Version
2.0
07/17/2014
Björn Kaemena
Update of the technical specifications
Involved People
Name
Company / Institute
Chin-Shun Ku
NSRRC
Björn Kaemena
SmarAct GmbH
Project Time Frame
Date
Phase
Description
06/02/2014
Start
Preliminary definition of specifications
August –
September 2014
Design
Mechanical design of the positioning system by SmarAct
October 2014
Approval
Design approval by NSRRC
December 2014 –
January 2015
Manufacturing Manufacturing of the complete system
February 2015
Delivery
Delivery of the complete system
Preliminary specifications, which might change during the design phase
File: NSRRC_Specifications_2.0.odt
Author: Björn Kaemena
Page 1 / 10
Version: 1
Complete System Specification
Save date: 07/21/2014
Application
The Smarpod and the 17D manipulator are going to be working inside a beamline endstation high vacuum
chamber. The SmarAct system will be used for precise (nanometer scale) positioning purposes. The 17D
manipulator consists of four 3D manipulators and one xy stage with an additional rotary positioner, which is
connected to the xy stage. Two rotary positioners will be attached to one 3D stage. All four 3D stages will be
equipped with probe holders (2x STM tip holder, 1x NSOM probe holder and 1x Akiyama probe holder).
File: NSRRC_Specifications_2.0.odt
Author: Björn Kaemena
Page 2 / 10
Version: 1
Complete System Specification
Save date: 07/21/2014
Mechanical Setup
The whole mechanical setup SmarPod + 17D manipulator will be mounted onto a breadboard inside the
vacuum chamber.
The mechanical design of the SmarPod and 17D manipulator will be conducted under consideration of the
given CAD model of the NSRRC end station (140331endstation_T_20140403) in order to avoid collisions
with parts of the chamber. NSSRC will inform SmarAct immediately if the design of any part of the chamber
changes.
NSRRC will provide a mechanical safety feature to ensure that the cryostat and the SmarPod + 17D
manipulator are moved at the same time and the same speed.
The sample transfer will be performed as follows: The Ferrovac transfer rod with the sample holder will stop
at a safe location at the side of the SmarPod. The SmarPod will then be used to perform the actual transfer
of the sample holder into the sample holder stage. This will prevent the occurrence of too high forces and
torques.
SmarPod
drive technology
piezo stick-slip
travel range
see below
max. pay load
1500g incl. 17D
manipulator
max. lateral force, which can be
applied to the top plate
3N
max. torque, which can be applied to 0.1Nm
the top plate
temperature range during operation
0 – 60 °C
temperature range with turned off
positioners
0 – 80 °C
measuring principle of the sensor
optical, incremental
resolution of the sensor
1-2nm
reference marks
distance-coded
preliminary. Has to be defined
preliminary. Has to be defined
integrated in every single linear positioner
integrated in every single linear positioner
The SmarPod manipulator will be designed to fulfill the following travel range requirements according to the
coordinate definitions shown below. The pivot point (center of rotation) is located at the sample position.
File: NSRRC_Specifications_2.0.odt
Author: Björn Kaemena
Page 3 / 10
Version: 1
Complete System Specification
•
Save date: 07/21/2014
Moving sample towards electron column
X (mm)
Y (mm)
Z (mm)
Rx (°)
Ry (°)
Rz (°)
-5 — +5
25 — 30
25 — 30
-5 — +5
-5 — +5
-5 — +5
•
Adjusting the position for different sample thicknesses in order to align the sample surface with the
focus point of the X-ray beam
X (mm)
Y (mm)
Z (mm)
Rx (°)
Ry (°)
Rz (°)
-5 — +5
-10 — 10
-10 — 10
-5 — +5
-5 — +5
-5 — +5
•
X (mm)
SmarPod as scanner for usage with own sample stage (17D manipulator removed)
Y (mm)
-30 — 30
0
if not achievable
-15 — 15
•
Z (mm)
Rx (°)
-30 — 30
0
if not achievable
-15 — 30
Ry (°)
Rz (°)
0
0
Adjustment of the sample holder stage in order to be able to receive the sample holder from the
Ferrovac transfer rod
X (mm)
Y (mm)
Z (mm)
Rx (°)
Ry (°)
Rz (°)
-5 — 5
-5 — 5
-5 — 5
-5 — +5
-5 — +5
-5 — +5
•
Adjustment of the sample surface of wedged samples with respect to the normal measurement angle
of 45°
File: NSRRC_Specifications_2.0.odt
Author: Björn Kaemena
Page 4 / 10
Version: 1
Complete System Specification
Save date: 07/21/2014
X (mm)
Y (mm)
Z (mm)
Rx (°)
Ry (°)
Rz (°)
-5 — +5
-5 — +5
-5 — +5
-10 — +10
-2 — +2
-2 — +2
The SmarPod will offer the following positioning specification:
- integrated optical encoders for all axes with distance-coded reference marks
- closed-loop resolution of the SmarPod: 1-2nm
- free of backlash and reversal play
Exchange of the 17D manipulator with third party sample stage
A special quick and release fastener system will be design for the exchange of the 17D manipulator with a
different third party sample stage. During the stage exchange forces and torques must not exceed the
specified range.
17D manipulator
The 17D manipulator will consist out of a common base plate, four 3D manipulators and one 2D + rotary
positioner sample stage. One 3D manipulator will offer two additional rotary positioners. All four 3D
manipulators will be equipped with probe holders (2x STM tip holder, 1x NSOM probe holder and 1x Akiyama
probe holder). NSRRC has to specify the design of the holders. The probe holders will come without any
cabling. SmarAct will only provide pure mechanical probe holders.
All four 3D manipulators and the 2D + rotary positioner sample stage will be designed in order to allow a
quick exchange. The cables will not directly go through the base plate of the 17D manipulator. The cables
will just be attached by a clamp in order to allow a quick and easy exchange of each 3D manipulator and the
sample stage.
The 17D manipulator will be equipped with thermocouples in order to measure the temperature of the
positioners. The exact design has to be defined.
File: NSRRC_Specifications_2.0.odt
Author: Björn Kaemena
Page 5 / 10
Version: 1
Complete System Specification
Save date: 07/21/2014
3D manipulators
Consists out of three SLC-1730-SC-HV positioners and a common base plate with the following
specifications:
drive technology
piezo stick-slip
travel range
21 mm
in every single direction
max. pay load
100g
for 3D stages
40g
for 5D stage (XYZRR) Preliminary. Has to
be defined
blocking force
3N
max. velocity
10mm/s
max. torque
0.6Nm
maximum values! For daily use the values
have to be divided by a safety factor of 10.
Obey maximum torques and forces of
SmarPod
measuring principle of the sensor
optical, incremental
integrated in every single linear positioner
resolution of the sensor
1-2nm
reference marks
distance-coded
integrated in every single linear positioner
The additional rotary positioners for one of the 3D stages are SR-2013-S-HV and offer:
File: NSRRC_Specifications_2.0.odt
Author: Björn Kaemena
Page 6 / 10
Version: 1
Complete System Specification
drive technology
piezo stick-slip
travel range
<360°
max. normal force
3N
blocking torque (parallel to axis of
rotation)
0.5Ncm
max. torque perpendicular to axis of
rotation
6Ncm
measuring principle of the sensor
optical, incremental
resolution of the sensor
25µ°
reference marks
single mark
top plate
electrically insulated
Save date: 07/21/2014
Preliminary. Has to be defined
Maximum values! For daily use the values
have to be divided by a safety factor of 10.
Obey maximum torques and forces of
SmarPod
Sample manipulator
The sample manipulator will consist out of a common base plate, two SLC-1750-HV positioners, two SLC1750-SC-HV positioners and a rotary positioner with the following specs.
drive technology
piezo stick-slip
travel range
31 mm
blocking force
3N
Max. load
in every single direction
Has to be defined. Maybe use constant
force springs to counterbalance the weight
of the Ferrovac sample stage
max. velocity
10mm/s
max. torque
1.2Nm
maximum values! For daily use the values
have to be divided by a safety factor of 10.
Obey maximum torques and forces of
SmarPod
measuring principle of the sensor
optical, incremental
integrated in every single linear positioner
resolution of the sensor
1-2nm
reference marks
distance-coded
integrated in every single linear positioner
The rotary positioner is not defined yet.
The linear postioners and the rotary positioner might change during the design phase.
Due to the design of the 17D manipulator the probe holders may collide with each other resulting in damage
to the probe and probe holder. Damage to the system because of collision shall be the sole responsibility of
NSRRC.
Controller
File: NSRRC_Specifications_2.0.odt
Author: Björn Kaemena
Page 7 / 10
Version: 1
Complete System Specification
Save date: 07/21/2014
Two 19'' - rack housing for up to six MCS rack modules, incl. power supply module. One rack housing for the
17D manipulator and one for the SmarPod
MCS-RACK-19
Every rack is equipped with one MCS-3CC-ETH-MOD offering Ethernet connectivity for the whole rack. The
other modules are MCS-3CC-MOD. Each module offers closed-loop control for up to three positioners.
MCS-3CC-MOD
4 MCS modules for the 17D manipulator will be MCS-3CC-MOD-DU with 3SSF-TAB modules enabling the
direct 0—5V input from a third party piezo driver for up to 12 positioners.
3SSF-TAB module
The design of the MCS-3CC-MOD-DU and 3SSF-TAB module and their electrical connection has to be
defined.
File: NSRRC_Specifications_2.0.odt
Author: Björn Kaemena
Page 8 / 10
Version: 1
Complete System Specification
Save date: 07/21/2014
Cabling
The exact cabling has to be defined.
The cable length from the positioning system to the feedthrough can reach a maximum length of 120cm.
2B LEMO vacuum feedthroughs (32 pins, SJG.2B.332.CLASV) with straight plugs will be used for the
electrical connection of the positioning system with the controller on the atmospheric side.
The sensor module MCS-3S-EP-LEMO2B will be located just outside the vacuum mounted onto the LEMO
2B plug.
The cable length between the sensor module and the MCS controller will not exceed 20m.
Vacuum Compatibility
Our positioning system is suited to work in vacuum conditions with pressures down to 1x10 -6mbar. To
achieve these pressures the chamber has to be equipped with pumps offering sufficient pumping speed.
Used materials:
–
Aluminum alloy, EN AW-5083 (AlMg4,5Mn)
–
stainless steel, material no. 1.4125, X105CrMo17
–
ceramics (e.g. zirconium dioxide ZrO2)
–
Silicon nitride Si3N4
–
Fomblin vacuum compatible lubricants
–
high vacuum compatible cables, PTFE insulated
–
epoxy glues
General
The system will be sold under our standard terms of sale and delivery.
File: NSRRC_Specifications_2.0.odt
Author: Björn Kaemena
Page 9 / 10
Version: 1
Complete System Specification
Save date: 07/21/2014
There will be no acceptance test of the system. The whole system is going to be shipped EX Works
(Incoterms 2010) from Oldenburg, Germany.
The system does come without any on-site installation support. If on-site installation support is needed it will
be charged extra.
Our general warning and handling instructions do apply for the positioning system.
File: NSRRC_Specifications_2.0.odt
Author: Björn Kaemena
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