A New Paradigm for Engineering

Clean & Plasma Coating 분야
선두업체로써, Total Solution제공을 통해
A New Paradigm for
Engineering
무결점 명품을 만들어 갑니다.
Clean & Clear Innovation System
517-19, Samcheonbyeongma-ro, Paltan-myeon,
Hwaseong-si, Gyeonggi-do, 445-911 Korea
TEL. +82-31-366-3390
FAX. +82-31-366-3394
(주) 싸이노스
연혁 Milestone
미래를 선도하는 초일류 기업
반도체 부품세정의 No.1기업 세계를 향상
CINOS의 도전입니다.
2013
We, CINOS, are leading semiconductor parts
cleaning & coating industry in South Korea and seek
to become a corporation that is leading a global
일본 도시바 社 세정부분 NDA 체결
ASM 社 Cleaning Qualified Vendor 등록
semiconductor refurbishment business.
10 발안 제 3공장 완공 (예정)
08 중국 시안 공장 완공 (예정)
05 TEL 社 Cleaning Qualified Vendor 등록
04 High Density Y203 Coated Ceramic Window Precision Cleaning 개발
03 중국 시안 공장 착공
2012
Cho Chul Hyung President
안녕하십니까.
CINOS는 2002년 창사이래 끊임없는 연구활동과 도전정신으로 Cleaning기술혁신에 노력하였으며 고도화된 반도체부품 정밀세정 및 재생
기술을 바탕으로 국내 Major 반도체 제조회사 및 설비업체에 세정 & 코팅 서비스를 제공하고 있습니다. 품질을 최우선으로 하는 품질 경영
방침과 같이 당사는 최고의 품질을 최단납기로 고객에 공급할 수 있도록 최선을 다하고 있습니다.
2007년 완공된 신공장은 최신설비 도입 및 작업동선의 과학적 설계, 반도체 공정간 오염으로 인한 반도체 수율 저하의 원인을 최소화 하기
위해 설계된 곳으로 고객에 대한 최고품질의 서비스를 제공할 수 있을 것으로 자부합니다. 또한 2012년도 경기도일자리 우수기업, 유망중
소기업으로 선정 국내 청년 실업 해소와 중소기업의 균형 발전에 적극 노력하여 지역사회 발전에도 이바지 하고 있습니다.
앞으로도 고객과 함께하는 (주)싸이노스가 되기위해 최선을 다하겠습니다.
지속적인 관심과 격려를 부탁드립니다.
2010
Resistered as Cleaning Qualified Vendor for ASM
Development of CVD Sic Ring Perfect Precison Cleaning
12
09
07
04
03
경기도 유망중소기업 선정
경기도 일자리 우수기업 선정
Awarded Excellent prospects Company in Gyeonggi area
Awarded Excellence Recruitment Company in Gyenggi Area
삼성전자 중국 시안 공장 세정 코팅 부문 유치 확정
Qualified as Sole Vendor for Samsung at Xian China
METAL 공정 ARC Spray 공정 신기술 개발 (Hemi-Coating)
Developed New Arc Spray Coating (Hemi-Coating)
New Coating 개발 (SY_YAG) 및 양산 적용
Developed New Coating (SY_YAG) and Started to Apply for SY_YAG
06 한양대학교 산학 연구 체결
03 SEMES 社 Coating Qual_양산 진행
Cleaning & Coating SCM Model of Samsung
Qualified as Professional Shower Head Cleaning Company by SEC
R&D Contracted with Hanyang University
Contracted with SEMES Eng. for Part Cleaning & Coating
참앤씨 社 설비_세정 / 코팅 양산 진행
Contracted with Cham Eng. for Part Cleaning & Coating
Atto 社 설비_세정 부분 양산 진행
Contracted with Atto for Part Cleaning & Coating
IPS 社 설비_세정 / 코팅 양산 진행
Contracted with IPS for Part Cleaning & Coating
2009
06 LAM ESC 4xx Series Precision Cleaning 기술 개발
02 삼성 LED 사업부 신규 세정 양산 적용
Developed new Technology for LAM ESC 4xx Series Cleaning
Qualified Samsung LED parts Cleaning
15-L NEW Y2O3 Coating 개발 및 양산 Developed & Produced for 15L New Y2O3 Coating
2008
LAM 社 를 통한 하이닉스 세정 Qual
삼성 NRD 연구소 CU 공정 Cleaning 기술개발
Hynix Cleaning qualification for LAM
Developed Clenaing Technology (CU process) for Samsung NRD LAB
LAM 社 ESC Series Cleaning 기술 제휴
Technology Partnership with LAM Research (ESC Series Cleaning)
Plasma Spray Coating Qual
Qualified Plasma Spray Coating
2007
08
07
06
01
12 ㈜싸이노스엔지니어링에서 ㈜싸이노스로 상호변경
08 ISO 14001 인증
04 6시그마 활동(BB:2/GB:10)인증
2006 07 유망 중소기업 선정
기술혁신형 중소기업 (INNO-BIZ) 인정
2005
2004
2003
of art facilities provide critical cleaning, high purity surface preparation, quartz fabrication and plasma coating. we are trying
2002
to focus on service excellence and fast turnaround time to ensure that our customers meet their deadlines and help our
customers achieve success and reduce costs and extend parts life and maintenance cycles.
NDA Contract with TOSHIBA Japan
companies and precision manufacturers. We specialize in precision cleaning and coating for Semiconductor parts. Our state
Initiated Contruction of Facilities at Xian China
CINOS, Founded in 2002 and headquartered in Hwa-Sung City, South Korea, partners with world leading semiconductor
Resistered as Cleaning Qualified Vendor for TEL
Development of High Density Y203 Coated Ceramic Window Precision Cleaning
02 CVD Sic Ring Perfect Precison Cleaning 개발
10 Cleaning & Coating SCM Model of Samsung
2011
SEC 全 부서 Shower head Cleaning 전문 업체 선정
3rd Facility Construction at Ba-Ran (Expected)
China Branch Facility Construction (Expected)
Changed CI From CINO ENG. To CINOS
Certified ISO 14001
Certified 6 Sigma Activity (BB:2/GB:10)
Awarded Excellent prospects Company in Gyeonggi area
Cetified as INNO-BIZ by SMB Administration
03
10
06
05
03
01
ERP 전산화 SYSTEM 도입 (시행 : 05년 4월~)
Set up the ERP System
300MM 제품 양산 세정 적용
300MM 12,13L 세정 제품 QUAL
Lauched Mass Production of 300MM 12,13L Cleaning Parts
Qualified 300MM 12,13L Cleaning Parts
AL2O3, Y2O3 COATING QUAL
Qualified AL2O3, Y2O3 Coating
부설연구소 설립 AL ARC SPRAY COATING QUAL
Established New Research Center, Qualified Al Arc Spray Coating
호서대 산학 협력연구 체결
R&D Contracted with Hoseo University
11
07
04
03
01
벤처기업 인증 (중소기업청)
ISO 9001 인증
Certified Excellence Venture Company
Certified ISO 9001
우량 중소기업 인증
Qualified as Outstanding Company
QSI 협력업체 등록
Resitered As Official Cooperative Firm by QSI
삼성전기㈜ 협력업체 등록
Resitered As Official Cleaning Supplier by SEC
12
09
04
02
삼성전자 세정제품 QUAL
제 1공장 준공 (9.17)
Quailified Cleaning Product by SEC
Completed 1st Facility Construction at Pal-tan Area
우량 중소기업 선정
Selected as a outstanding Company by Government
회사설립
Established "CINOS"
We sincerely hope your business is doing well and I look forward to working with you in the near future.
주요고객 Major Customer
2
A New Paradigm for Engineering
3
세정 Our Cleaning
세정품의 종류 Cleaning Application Product
ERP SYSTEM을 통한 체계적인 부품
Life Time 이력관리 전문화된 세정
Process의 전산 시스템 도입 통한 세정재현성 관리
Metal Type · 공정 Gas Type
유기물 Type · 입사정 Type 등
미세 오염물 제거
Metal Type · Process Gas Type
Organic Type · Particle Type
Controlling Micro Contamination
오염제어
Contamination
Control
부품 흐름 관리
Life Cycle
Management
ETCH
METAL
Anodizing Cleaning
Quartz Cleaning
Ceramic+ Y₂0₃ Coating Cleaning
PVD W kit Cleaning
CVD
DIFFUSION
Ceramic Dome(Epoxy) Cleaning
Vaporizer Cleaning
Shower Head Cleaning
LFC Cleaning
Organized and Professional
Management of Part Life Time
Records through ERP System
Precision
Cleaning
To eliminate by-product
on parts without any
damages
Surface Treatment, ARC Spray 작업 등 부품
사용 시간 증가 및 CIS, DIS 등 특허기술을 통한
HOLE 내부 Contamination 제어
Increase Parts Durability During Surface
Treatment, ARC Spray, Controlling Internal Hole
Contamination Using Specialized Technologies
특화기술
Specialized
Technology
3차원 측정기, Airborne Particle Counter,
RGA 등의 정밀 분석을 통한 세정 후
오염물 잔존여부 확인 및 품질 보증
테스트&분석
Test&Analysis
Equipped State of Arts
Analysis Tools for Increasing
the Quality of Product
세정 특화 기술 Specialized Cleaning Technologies
Specilized Technology for
Chemical Cleaning
Specilized Technology for
Physical Cleaning
Specilized Technology for
Controlling Particle
4
Etch Process
Development of Removal Chemicals for Oxide, Poly and Metal Membranous
Metal Process
Development of Removal Chemicals for Cu, W, Ti, TiN, AL, La, Ta, Co, Au, Ag, Ni, Ru Membranous
CVD Process
Development of Process Membranous Chemicals for BPSG,ACL,ARC, Harp-USG,SiON, TeOS, HDP
Diffusion Process
Development of Process Membranous Chemicals for Nitrid, HFO, MTO, SiN, ALD, ZrO
Implant Process
Development of Contaminated Membranous Chemicals for AsH₃, BF₃, PH₃, B₂H6
Photo Process
Development of Removal Chemicals for PR
CMP Process
Development of Removal Chemicals for Slurry
LED Process
Development of Removal Chemicals for Al, GaN, P, In
CIS
Automatic Cleaning System for Mirco Porous Gas Hole Part
ACS
Coolant line Cleaning System for the Inside of Fab
MPS
Removal Device by using CO₂ Gas for Contaminated parts from Semiconductor process
APS
Automatic device for surface treament
Dry Bead Blaster
Elimination of contaminators on surface and process of generating roughness
Wet Bead Blaster
Process of Elimination of contaminators on surface without Damage
Furnace Cleaning
Process of Ejecting Gas from part by using heat treament
HPWS
Removal Device by using High Pressure for Micro P/C on Surface
UPW
Special process of Pad Wiping for Miro P/C on Surface
MBS
Elimination of Unstable P/C Factors for ARC Coated Part
DIS
Automatic Cleaning System for Micro Poruos Gas Hole Part
PBRS
Particle Removal System for Micro Poruos Gas Hole Part
A New Paradigm for Engineering
5
코팅 Our Coating
코팅 핵심 기술 Coating Core Technology
Coating Merit
Decrease
Coating
Porosity
Decrease
Heat
Damage
·Coating Particle Source 인자 Down
·Plasma Gas에 의한 Coating Damage Down - 내 Plasma 우수
Y203 Powder
Application Capability
·Decrease the source of coating particle
·Damage decrease on coated area by plasma gas
- Excellent Plasma resisting
CINOS
Coating
Increase
Coating
Hardness
●
Process Control
·Y₂0₃ Oxidation Temp, Control
·Speed Factor(speed 1, 2, 3, 4) Control
·Nozzle Distance Control
·고온에서 Coating Damage Down
-고온의 Chamber 내부에서도 Coating Damage Down
·Damage decrease on coated area at high temp
as well as in high temp chamber
New Type H/W
●
Qualified Powder
●
·Y₂0₃ Composition Control
·Impurities Control
·High Density Powder Shape
Charateristic
·Porosity
·Adhesion
·Various Shapes and Materials
코팅 적용품 Coating Application Product
Development
New Coating
Anodizing
Ceramic
Inner Liner
Bottom Edge Ring
GDP
Top Edge Ring
Door Liner
Ceramic Window
·Y203, YAG 및 YX Coating 개발
·Development of new generation coating
-YX Coating
Coating Mechanism
Inserting Coated Powder
Melted Powder
Coating
6 A New Paradigm for Engineering
7
품질경영시스템 Quaility Control System
가공(관계사) Fabrication(Associated company)
품질경영시스템의 지속적 개선을 통한 고객 만족
Satisfying Our Customer by Improving our Quality Control System
사업 영역 Business Area
(주)화영테크놀로지는 부품 가공, 미세 가공, JIG제작, SYSTEM 제작 분야에 끊임없는 기술개발로 성장해 가고 있습니다.
Hwa Young Tech Co.,Ltd offers such as Parts Fabrication, Precision Manufacturing, JIG & System for customer's needs.
부품가공 (Parts Fabrication)
P-D-C-A
Cycle
Responsibility
of Management
Customer
VOC
Continuous
Improving
Analysis and
Estimation
Management
of Resource
Input
*Machining Center가공
Machining Center
*자동자 부품 가공
Automobile Part
*반도체 세정 Jig가공
Semiconductor Clesning Jig
Manufacturing
Product
Satisfaction
of Customer
Product & Service
Output
지그제작 (JIG Prodcting)
*NC용 Fixture
Fixture for NC
*자동차부품용 Fixture
Automoblie part
*Inspection Jig
미세가공 (Precision Manufacturing)
*정밀부품가공
Micro Part Manufacturing
*광학기기 등 정밀가공
Optical Device Precision Part Producing
시스템제작 (System Producting)
*자동화설비
Automation system
*Loader & Unloader System
*Conveyor System
주요설비 Manufacturing Equipment
Vertical
Machining
Center
Value added Activity
<VM1260>
<MYNX 650>
<NARA 4311>
<NSM-A>
Information Flow
Miling
M/C
QM
(Quality Management)
QA
QC
(Quality Assurance)
(Quality Control)
·Quality Planning(품질 기획)
·Quality Test (품질검사)
·QM & EM System Control
·Non-Conformity Control (부적합품 관리)
(품질 & 환경경영 시스템 관리, ISO 인증관리)
·SPC (통계적 품질 관리)
·Design Review (개발 품질 관리)
·Clean Room Control(클린룸 환경 관리)
·SOP Control (표준 관리)
·Quality CFT Activity (품질개선 분임조 활동)
·System & Process Audit (시스템 & 공정감사)
·Quality Innovation (품질 혁신)
·Customer Satisfaction (고객만족)
주요 부품 현황 Core Part
부품가공
Parts Fabrication
미세가공
Micro part
Manufacturing
·Education & Certification(사내 교육 및 자격인증)
·Supplier Quality Control (공급업체 품질관리)
·Measurement System Control (측정 시스템 관리)
·Product & Work Shop Contamination Control
Jig 제작 부품
Jig
(제품 및 작업장 오염 관리)
품질인증 Quaility Certification
·ISO 9001 (품질경영시스템) Quality Management System
·ISO 14001 (환경경영시스템) Environmental Management System
8 A New Paradigm for Engineering
시스템 제작
System
9
World Best Technical Leader
Europe
China
USA
Japan
Singapore
Cleaning &
Coating
Kitting &
Assembly
Our goal is to be a Total
Engineering Company specialized in
"Refurbishment Business"
Life Cycle
Management
Part
Supply
Test &
Analysis
Repair
Service
10 A New Paradigm for Engineering
사업장 위치 Our Facility Location
Part
Management
제1사업장(경기 화성) Pal-Tan Base Facility
시노스유한공사(중국 서안) Cinos China
Address. 경기도 화성시 팔탄면 삼천병마로 517-19
517-19, Samcheonbyeongma-ro, Paltan-myeon,
Hwaseong-si, Gyeonggi-do, 445-911 Korea
TEL. +81-31-366-3390 FAX. +81-31-366-3394
Address. 중국 산서성 서안시 개발구
South Fenghui Rord, High-tech Development Zone,
Xi' an China
관계사 - ㈜화영테크놀로지(경기 화성) HwaYoung Tech
제2사업장(경기 화성) Hyangnam Base Facility
Address. 경기도 화성시 향남읍 구문천리 930-13
930-13, Gumuncheon-ri, Hyangnam-eup,
Hwaseong-si, Gyeonggi-do, Korea
TEL. +81-31-8014-4595
Address. 경기도 화성시 안녕동 178-118
178-118, Annyeong-dong,
Hwaseong-si, Gyeonggi-do, Korea
TEL. +81-31-225-5680 FAX. +81-31-225-5690
신공장(경기 화성) New Hyangnam Base Facility
Address. 경기도 화성시 향남읍 구문천리 930-17
930-17, Gumuncheon-ri, Hyangnam-eup,
Hwaseong-si, Gyeonggi-do, Korea
11