rotarex equipment

Transcription

rotarex equipment

ROTAREX
EQUIPMENT
M4.1
HOW TO ORDER
ROTAREX
EQUIPMENT
PA R T N U M B E R
Example :
M4.1V
1
MT
2
2V1
3
l
4
/
K
5
A/B : B1/4
6
MS
7
A total component solution, from source to process
Valve Actuation (Standard: Normally Closed=NC)
M4.1U
M4.1V
M4.1S
QT
MT
LP
HP
Manually actuated - Quarter Turn
Manually actuated - Multi Turn
Pneumatically actuated - Low Pressure
Pneumatically actuated - High Pressure
(Add - NO - for Normally Open version)
(Add - NF - for Normally Close version)
Ra 0,15μm EP (6 μin Ra)
Ra 0,4μm nonEP (15 μin Ra)
3 - Va l v e C o n f i g u r a t i o n s
2V1
2 ports in line
See below for other configurations
4 - Body Material (others on request)
5 - Seat Material
K
V
P
M
Standard colour:
for handles: white (other colours on request)
for LP actuators: NO=green NF=blue
for HP actuators: NO/NF=white
A
I
H
®
PCTFE (Kel-F )
PI (Vespel®)
PVDF
Metal (on request)
AISI 316L, VAR
AISI 316L
Hastelloy® (on request)
6 - End Connections
7 - Options
MS
FT
—
CI
Valve fitted with locking service
Panel mounting
Back mounting
Electric limit switch (LP actuators onl
GAZEL® -Female
(face seal)*
GAZEL® -Male
(face seal)*
V1/4-F
V1/4-M
B1/4
B6
RDB 6
RDB 1/4
®
GAZEL 1/4" - Female (Face Seal)*
GAZEL® 1/4" - Male (Face Seal)*
BWO 1/4" - Standard (Orbital Weld)
BWO 6 mm (Orbital Weld)
SAGALOK Double ring Fittings: 6 mm
SAGALOK Double ring Fitting: 1/4”
BWO for standard
welding heads
SAGALOK Double
ring Fitting
M4.1-leaf 09-2
Valve configurations
- L-7505 Lintgen, G.-D. of Luxembourg
ROTAREX Equipment, 24 rue de Diekirch, B.P.19, L-7505 Lintgen, Luxembourg
Tel. 352 - 32 78 32 - 1, fax 352 - 32 78 32 3, www.rotarex.com, @rotarex.com
Tel: +352 32 78 32 1, Fax: +352 32 78 32 317, www.rotarex.com, [email protected]
M4.1
SPRINGLESS DIAPHRAGM VALVES
FOR HP AND UHP APPLICATIONS
(STANDARD AND GAS SPECIFIC)
M
4.1
M4.1-leaf 09-2
2-
*All GAZEL® Face Seals are VCR ® compatible. VCR ® is a registered trade mark of CAJON CO., HASTELLOY® is a registered trade mark of CABOT Corp. , Kel-F®
is a registered trade mark of 3M company, Vespel® is a registered trade mark of DUPONT, ELGILOY® is a registered trade mark of ELGILOY Company.
1 - Va l v e S e r i e s a n d S u r f a c e F i n i s h
ROTAREX
ROTAREX
EQUIPMENT
M4.1
FEATURE a unique proven design
Selected Stainless Steels for low
sulfur content as well as
optimized impurity levels
Individual Serial number,
for full traceability
T E C H N I CA L DATA
Fully functional
from vacuum to
rated pressure
Precision
electropolishing
of all internal surfaces
Tied diaphragm
design for positive
seat opening and
retraction
Laser welded
diaphragm for
maximum reliability
Low particule
generation
Aerodynamic fully
swept flow passage
Unique high pressure
outboard leak test port
Excellent purgeability
AR PROCESS
Manufactured to the THREE ST
STAR
Va l v e G r a d e &
M4.1V
M4.1U
Body
SS 316L
SS 316L
SS 316L VAR
< 0,4 μm non EP (15μin Ra)
parts
all others
vacuum to 240 bar (3500 PSI)
M4.1 Pneumatic - Low Pressure
17 bar (250 PSI)
M4.1 Pneumatic - High Pressure
200 bar (2900 PSI)
Pneumatic actuator opening pressure
5 - 7 bar (75 - 105 PSI)
Temperature range
-20°C to + 80°C (-4° F to 176°F)
Burst Pressure
Flow Capacity (Cv)
850 bar (12500 PSI)
M4.1 Manual
Cv = 0.26
M4.1 Pneumatic
Cv = 0.26
Certified max. Helium inboard leak rate
< 1.10-9 mbar.l/sec
Certified max. Helium outboard leak rate (at max. pressure)
< 1.10-9 mbar.l/sec
Certified max. Helium across the seat leak rate (at max. pressure) < 1.10-9 mbar.l/sec
Wetted volume
< 1.2 cc
Mounting
Panel or back mounting
Nominal seatDiameter
4 mm (0,16”)
< 0,25 μm EP (10μin Ra) < 0,15 μm EP (6μin Ra)
Hastelloy®
Diaphragm
Backup diaphragms
Standard, High and Ultra High Purity, corrosive and non-corrosive gases
M4.1 Manual
Materials
M4.1S
Seat Material
Max working pressure
DIMENSIONS
Parts
Non-wetted
Fluid Media
®
CONSTRUCTION MATERIALS
Wetted parts Surface Finish
Kel-F® (Vespel®, PVDF, metal on request)
Elgiloy®
Stainless Steel or alloys
M4.1 - Pneumatic Valve
Low Pressure
Manual Actuation
Pneumatic Actuation
Parts for all valve grades
Parts
Upper spindle
Brass
Actuator Body SS 316 L
Handle
Aluminum or
Piston
Extruded Plastic
O-rings
Stainless Steel or Alloys
All others
All others
M4.1
Assembling, testing & Packaging
in cleanroom Cl. 10
Visual Open/Close indicator
(ON/OFF window
on Multiturn version)
Compact size
EQUIPMENT
Low Pressure
M4.1
Multiturn valve
(MT) with open/
close window
High Pressure
Aluminum
Aluminum
NBR - PC 851
M4.1 - Pneumatic valve
High Pressure
M4.1 - Quarter turn (QT) valve
ROTAREX
Group
ROTAREX
Group
M4.1-leaf 09-2
M4.1-leaf 09-2
M4.1
bottom view
ROTAREX
EQUIPMENT
M4-SI
H
ROTAREX
EQUIPMENT
PART NUMBER
Example :
M4SI V
1
BP
2
2V1
3
K
4
A/B:B1/4
5
6
1 - Valve Series, Surface finish & Body material
4 - Seat Material
M4-SI V - Ra 0.25 μm EP (10 μin Ra)-316 L VAR
M4-SI S - Ra 0.4 μm (15 μin Ra)-316 L low sulf.
K
V
P
PCTFE (Kel-F®)
Pi (Vespel®) (optional)
PVDF (optional)
M4-SI (Reverse seat)
DIAPHRAGM LINE VALVES
2 - Valve Actuation
BM
Multi-Turn Handwheel (8.6bar)
LM
Multi-Turn Handwheel (20bar)
HM
Multi-Turn Handwheel (240bar)
BPNF
Pneumatically actuated (8.6bar)
LPNF/LPNO* Pneumatically actuated (20bar)
HPNF/HPNO*Pneumatically actuated (240bar)
BQ
Quarter-Turn Handwheel (8.6bar)
LQ
Quarter-Turn Handwheel (20bar)
*NF=normally closed /NO=normally open
5 - End Connections
V 1/4 F
V 1/4 M
B 1/4
B6
GAZEL® 1/4" - Female (Face Seal*)
GAZEL® 1/4" - Male (Face Seal*)
BWO 1/4" (Butt Orbital Weld)
BWO 6 mm (Butt Orbital Weld)
6 - Options
FT
CI
Panel Mounting
Electric limit switch
3 - Valve Configurations
2V1
2 ports in line
BWO for standard
welding heads
SAGALOK Double
ring Fitting
Valve Configurations
- 24 rue de Diekirch, B.P.19, L-7505 Lintgen, Luxembourg
Tel. +352 - 32 7824
32rue
- 1, de
fax +352
- 32 78
32
317,
www.rotarex.com,
[email protected]
ROTAREX Equipment,
Diekirch,
B.P
.19,
L-7505
Lintgen, Luxembourg
M
4-SI
Blue
Blue
Blue
Green
White
Black
M4-SI-leaf 06-4
GAZEL® -Male
(face seal)*
BM,LM,HM :
BPNF
LPNF
LPNO
HPNF/HPNO
BQ,LQ
*All GAZEL® Face Seals are VCR ® compatible. VCR ® is a registered trade mark of CAJON CO.,
Kel-F® is a registered trade mark of 3M company, Vespel® is a registered trade mark of DuPont.
All rights of change reserved.
GAZEL® -Female
(face seal)*
Standard Colors
ROTAREX
ROTAREX
EQUIPMENT
M4-SI
Selected Stainless Steels for
low sulfur content as well as
EQUIPMENT
M4-SI
T E C H N I C A L DAT A
Assembling, testing &
Packaging in
cleanroom Cl. 10
Fluid Media
Compact size
Visual Open/Close
Indicator (ON/OFF
window on Multiturn
version)
Precision electropolishing
Fully functional from
vacuum to rated
pressure
Long life technology
Standard, HP, UHP, corrosive and non-corrosive gases
M4-SI manual multiturn MT
3500 PSI (240 bar) or 290 PSI (20 bar) or 125 PSI (8.6bar)
M4-SI pneumatic BPNF
125 PSI (8.6 bar)
M4-SI pneumatic LPNF - LPNO
290 PSI (20 bar)
M4-SI 1/4 turn QT
125 PSI (8.6 bar) or 290 PSI (20 bar)
M4-SI pneumatic HPNF - HPNO
3500 PSI (240 bar)
Pneumatic actuator opening pressure
5 - 7 bar (75 to 105 PSI)
Temperature range
-20°C to+65°C (-4°F to 149°F)(Vespel®seat to:155°C/311°F)
Burst pressure
12500 PSI (850 bar)
Flow Capacity
Cv = 0.2
< 1.10-9 mbar.l/sec
< 1.10-9 mbar.l/sec
Low particule
generation
Aerodynamic fully
swept flow passage
Wetted volume
< 1.2 cc
Mounting
Back mounting or optional Panel mounting
Nominal seat diameter
4 mm (0.16”)
Excellent
purgeability
AR PROCESS®
STAR
Va l v e G r a d e & M a t e r i a l s
Wetted Parts
Parts
M4-SI S
Body
SS 316 L
Surface Finish
M4-SI V
SS 316 L VAR
< 0,4 μm (15μin Ra)
Diaphragm
Seat material
Non-wetted parts
< 0,25 μm EP (10μin Ra)
M4-SI
bottom view
Polished Nickel Alloy
Kel-F® (PVDF or Vespel® on request )
Backup diaphragms
Nickel Alloy
All others
M4-SI
Multiturn valve (MT)
with open/close
window
M4-SI - Quarter turn (QT) valve
Air connector
1/8”NPT
Air connector
1/8”NPT
Pneumatic Actuation
Parts
Upper Spindel
Brass
Actuator Body
Aluminium
Handle
All others
Plastic(Alu.optional for MT)
Stainless Steel
Piston
Brass
O-rings
NBR-PC 851
All others
Stainless Steel
M4-SI - Pneumatic valve
Medium Pressure (LPNF,
LPNO)
M4-SI Pneumatic valve
Low pressure (BPNF)
M4-SI Pneumatic valve
High Pressure (HPNF,
HPNO)
ROTAREX
Group
M4-SI-leaf 06-4
M4-SI-leaf 07-3
Manual Actuation
SELFA
Valves & Fittings
EQUIPMENT
ROTAREX
SELFA
M8.1
HOW TO ORDER
ROTAREX
Valves & Fittings
PA R T N U M B E R
MT
2
2V1
3
l
4
/
K
5
A/B:B3/8
6
MS
7
2 - Valve Actuation (Standard: Normally closed)
M8.1U
M8.1V
M8.1S
QT
MT
LP
HP
(Add - NF - for normally close version)
Standard colour:
for LP actuators: NO=green NF=blue
for HP actuators: NO/NF=white
3 - Va l v e C o n f i g u r a t i o n s
2V1
2 ports in line
A
I
H
5 - Seat Material
®
PCTFE (Kel-F )
PI (Vespel®)
PVDF
Metal (on request)
K
V
P
M
6 - End Connections
7 - Options
MS
FT
—
CI
Valve fitted with locking device (manual)
Panel mounting
Back mounting
Electric limit switch (LP actuators only)
GAZEL® -Female
(face seal)*
AISI 316L, VAR
AISI 316L
GAZEL® -Male
(face seal)*
V3/8-F
V3/8-M
B3/8
B1/2
B10
B12
RDB 10
RDB 12
RDB 1/2
RDB 3/8
GAZEL® 3/8 - Female (Face Seal)*
GAZEL® 3/8 - Male (Face Seal)*
BWO 1/2" - (Orbital Weld)
SAGALOK Double ring fitting: 10 mm
SAGALOK Double ring fitting: 12 mm
SAGALOK Double ring fitting: 1/2”
SAGALOK Double ring fitting: 3/8”
BWO for standard
welding heads
SAGALOK Double
ring fitting
M8.1-leaf 09-2
Valve Configurations
ROTAREX
Group
ROTAREX
Equipment,
24 S.A.
rue de
Diekirch,
.19,
Lintgen, Luxembourg
SELF
A-V
alves & Fittings
SELFA-V
A-Valves
- L-7505
Lintgen,B.P
G.-D.
of L-7505
Luxembourg
M8.1
Tel. *352
- 32
32 78
- 1, fax
*352 32
- 3278
78 32
www.rotarex.com,
[email protected]
Tel:+352
+352
1,32Fax:
+352
32322,
317,
www.rotarex.com,
[email protected]
Tel:
3232
78 78
32 1,
Fax:
+352 32
78 32 317,
www.rotarex.com,
[email protected]
M
8.1
M8.1-leaf 09-2
M8.1S
1
Example :
EQUIPMENT
ROTAREX
Group
SELFA
SELFA
Valves & FittingsEQUIPMENT
ROTAREX
& Fittings
EQUIPMENT
ROTAREXValves
M8.1
The M8-1 was designed in response to the industry’s needs for a compact HIGH FLOW high/low pressure valve dedicated to gas
distribution techniques that require high flow rates. This valve is ideal for handling high flow gases such as HCl, N2O, etc. upstream and
downstream of the source regulator. Its compact size and standard panel mount holes enable it to be integrated into gas supply
systems where previously only standard valves with low Cv’s could be used.
M8.1
Fluid Media
in cleanroom Cl. 10
Selected Stainless Steels for low sulfur
content as well as optimized impurity
levels
Visual Open/Close
indicator
Compact size
Precision
electropolishing
Fully functional
from vacuum to
rated pressure
outboard leak test port
Laser welded
diaphragm for
maximum reliability
Tied diaphragm design
for positive seat opening
and retractation
Low particule
generation
Excellent
purgeability
M8.1 Manual
vacuum to 240 bar (3500 PSI)
M8.1 Pneumatic - Low Pressure
17 bar (250 PSI)
M8.1 Pneumatic - High Pressure
200 bar (2900 PSI)
Pneumatic actuator operating pressure
5 - 7 bar (75 - 105 PSI)
Temperature range
-20°C to + 80°C (-2°F to 176°F)
Burst Pressure
Flow Capacity (Cv)
850 bar (12500 PSI)
M8.1 Manual
Cv = 0.53
M8.1 Pneumatic
Cv = 0.53
< 1.10-9 mbar.l/sec
< 1.10-9 mbar.l/sec
Wetted volume
< 1.6 cc
Mounting
Front or back mounting
Nominal seat Diameter
8 mm (0,32”)
Aerodynamic fully
swept flow passage
AR PROCESS
STAR
®
DIMENSIONS
Materials
Parts
M8.1S
M8.1V
M8.1U
Body
SS 316L
SS 316L
SS 316L VAR
Seat Material
Non-wetted
Backup diaphragms
parts
all others
Hastelloy®
Diaphragm
Elgiloy®
M8.1 Quarter turn (QT) valve
M8.1- Pneumatic valve
Low Pressure
Parts
Low Pressure
Upper spindle
Brass
Handle
Aluminum or
Piston
Extruded Plastic
O-rings
All others
All others
M8.1-leaf 09-2
Pneumatic Actuation
(
High Pressure
1.14”)
ø 25.4 (1.0)
Aluminum
Aluminum
M8.1- High Pressure
Pneumatic valve
NBR - PC 851
M8.1
Bottom view
M8.1 Multi turn valve (MT)
with on/off window
ROTAREX
Group
ROTAREX
Group
M8.1-leaf 09-2
Manual Actuation
ROTAREX
EQUIPMENT
HOW TO ORDER
ROTAREX
M8SI
EQUIPMENT
PART NUMBER
Example :
M8SI V
1
BPNF
2
2V1
3
K
4
A/B:B3/8
5
6
1 - Valve Series & Surface finish
5.1 - Standard End Connections
M8SI V - Ra 0.25 μm (10 μin Ra) EP
M8SI S - Ra 0.4 μm (15 μin Ra) Non EP
V 3/8-F
V 3/8-M
B 3/8
B 1/2
B 10
B 12
RDB 3/8
RDB 1/2
(with tube fittings only)
2.1 - Standard Valve Actuation
LM
BPNF/BPNO*
LQ
Multi-Turn Handwheel (20 bar)
Pneumatically actuated (10 bar)
Quarter-Turn Handwheel (20 bar)
5.2 - Optional End Connections
2.2 - Optional Valve Actuation
RDB 10
RDB 12
Quarter turn short lever (20 bar)
3 - Standard Valve Configurations
2V1
2 ports in line
3V4
3 ports T configuration
See below for other configurations, on request
4 - Seat Material
PCTFE (Kel-F®)
DN8 DIAPHRAGM VALVE
MANUAL AND AIR OPERATED PN10 & PN20
M
Tube fitting: 10 mm
Tube fitting: 12mm
6 - Options
FT
Panel Mounting (LQ only)
8SI
Standard colors
LM
BPNF
BPNO
LQ
Blue
Blue
Green
Blue
ROTAREX Equipment BP.19 - L-7505 Lintgen, Luxembourg
Tel. +352 - 32 78 32 - 1, fax +352 - 32 78 32 322, www.rotarex.com, [email protected]
M8SI-leaf 01-13
Valve Configurations on request
Kel-F® is a registered trademark of 3M company.
K
M8SI (Reverse seat)
GAZEL 3/8” - Female (Face Seal)
GAZEL 3/8” - Male (Face Seal) non swivel
BWO 3/8” (Orbital Welding)
BWO 1/2” (Orbital Welding)
BWO 10 mm (Orbital Welding)
BWO 12 mm (Orbital Welding)
Tube fitting: 3/8”
Tube fitting: 1/2”
*NF=normally closed / NO=normally open
LQS
ROTAREX
ROTAREX
EQUIPMENT
TECHNICAL DATA
M8SI
Spring-less, O-ring-less,
thread-less design
Selected Stainless Steels for
low sulfur content as well as
Metal/Metal Tightness to
the atmosphere
M8SI
TECHNICAL DATA
Fluid Media*
Individual Helium leak
test @ Pmax - Semaspec
#90120391B-STD, testing
method
Ultra High Purity Cleaning
according to ROTAREX
Specifications
M8-SI manual multiturn LM
290 PSI (20 bar)
M8-SI manual quarter turn LQ
290 PSI (20 bar)
M8-SI BPNF -BPNO
140 PSI (10 bar)
Assembling, testing &
packaging in
cleanroom Class ISO4/ISO7
Long life time technology
Individual serial number,
Fully functional from
vacuum to rated
pressure
Precision electropolishing
Double tightness for integral He
leak testing
-20°C/-4°F to +65°C/149°F (standard)
Burst pressure
6500 PSI (450 bar)
M8SI manual LM, pneumatic
Cv = 0.5
M8SI manual LQ
Cv = 0.4
< 1.10-9 mbar.l/sec
< 1.10-9 mbar.l/sec
Acc to SEMASPEC #90120391B-STD testing method
Certified max. Helium across the seat leak rate (at max. pressure) < 1.10 mbar.l/sec
-9
Aerodynamic fully
swept flow passage
Low particule generation
5 - 7 bar (75 to 105 PSI)
Temperature range
Flow Capacity
Visual Open/Close
Indicator on manual valves
Compact size
Wetted volume
< 1.6 cc
Mounting
Back mounting (standard) or panel mounting (optional for LQ only)
Nominal seat diameter
8 mm (0.32”)
*acc. to ISO 11114-2 non metallic material gas compatibility
Excellent purgeability
Manufactured to the THREE STAR PROCESS®
DIMENSIONS
MATERIALS
Valve Grade & Materials
M8-SI S (with tube fittings only)
Parts
Body
M8-SI V
SS 316 L low sulfur
Surface Finish
< 0,4 μm (15μin Ra) non EP
Diaphragm
< 0,25 μm (10μin Ra) EP
UNS R30003
Seat material
Kel-F®
Non-wetted parts Backup diaphragms
UNS R30003
All others
Stainless Steel
Manual Actuation
Quarterturn LQ
Multiturn LM
Pneumatic Actuation
Parts
Upper Spindel
Brass
Actuator Body
SS 303 /Aluminium
Handle
All others
Aluminium
Stainless Steel 316L
Piston
Brass /Aluminium /Stainless steel
O-rings
NBR
All others
M8SI-leaf 01-13
Wetted Parts
EQUIPMENT
Quarterturn LQS
Quarterturn LQ, option FT
Pneumatic BP
SELFA
Valves & Fittings
EQUIPMENT
ROTAREX
SELFA
M4.1
VB
M4.1// M8.1
M8.1VB
HOW TO ORDER
ROTAREX
Valves & Fittings
PA R T N U M B E R
A
3
A/B:B /4 C:V1/4MMS
5
K
4
6
2 - Valve Actuation (Standard: Normally closed)
M4.1/M8.1VB U
M4.1/M8.1VB V
M4.1/M8.1VB S
MT
QT
LP
HP
VB= Standard vertical purge block
VT= Vee-Block with transverse purge port
VTD= Vee-Block with right-hand purge port
VTG= Vee-Block with left-hand purge port
(Add - NF - for normally close version)
I
A
H
5 - M4.1 VB - End Connections - Port A-B-C-D
V 1/4-F GAZEL 1/4" - Female (face seal)*
V 1/4-M GAZEL 1/4" - Male (face seal)*
B 1/4
BWO 1/4" - Standard (Butt Weld Orbital)
B6
BWO 6 mm - Butt Weld Orbital
5 - M8.1 VB - End Connections - Port A-B-C-D
AISI 316L
AISI 316L, VAR
4 - Seat Material
PCTFE (Kel-F®)
PI (Vespel®)
PVDF
Metal (on request)
K
V
P
M
V 3/8-F
V 3/8-M
B 1/2
B 3/8
GAZEL 3/8" - Female (face seal)*
GAZEL 3/8" - Male (face seal)*
BWO 1/2" - Standard (Butt Weld Orbital)
BWO 3/8" - Butt Weld Orbital
SAGALOK Double ring fitting on request
6 - Options
A= Inlet Connection
B= Outlet Connection
C= Vertical Purge (right-hand purge for VT versions)
D= Left-hand Purge (when applicable)
MS
FT
—
CI
Valve fitted with locking device (manual)
Panel mounting
Back mounting
Electric limit switch (LP actuators only)
Dimensions mm (inches)
End Connection
L2
L3
L3VT
61
M4.1VB (2.40")
54,5
M8.1VB (2.14")
61
(2.40")
54,5
(2.14")
91
(3.58")
35,3
(1.39")
M4.1VB 52
(2.05")
M8.1VB 54,5
GAZEL® -Female (face seal)*
(2.14")
52
(2.05")
54,5
(2.14")
75
(2.95")
35,3
(1.39")
46
(1.81")
46
(1.81")
83,2
(3.27")
35,3
(1.39")
GAZEL® -Male (face seal)*
L1
BWO 1/4" (orbital weld)
top port
side port
M4-8.1VB-leaf 09-2
Note: All purge ports in 1/4"
ROTAREX
Group
SELF
A-V
alves & Fittings S.A. - L-7505 Lintgen, G.-D. of Luxembourg
SELFA-V
A-Valves
Tel. *352 - 32 78 32 - 1, fax *352 - 32 78 32 322, www.rotarex.com, [email protected]
M4.1 / M8.1 VB
IN LINE VALVE VEE BLOCK
M
4.1 VB
8.1 VB
M4-8.1VB-leaf 09-2
MT/MT
2/2
1
Example : M4.1VB U
1
EQUIPMENT
ROTAREX
Group
SELFA
SELFA
ROTAREX
& Fittings
EQUIPMENT
ROTAREXValves
M4.1/ M8.1VB
Controlled (PC) electropolishing for
better corrosion resistance
M 4.1/ M8.1VB
Fluid Media
Max working pressure M4.1/ M8.1VB Manual-Multi-turn -1/4 Turn
M4.1/ M8.1VB Pneumatic - Low Pressure
Developed from
proven M4.1/m8.1
valve technology
in cleanroom Class 10
5 - 7 bar (75 - 105 PSI)
Temperature range
-20°C to + 80°C (-2°F to 176°F)
Burst Pressure
Flow Capacity (Cv)
Pneumatic and manual
actuation available
Gas specific solutions (body
and seat materials)
240 bar (3500 PSI)
17 bar (250 PSI)
850 bar (12500 PSI)
M4.1/ M8.1VB Manual
M4.1VB:Cv = 0.26 / M8.1VB:Cv = 0.53
M4.1VB:Cv = 0.26 / M8.1VB:Cv = 0.53
M4.1/ M8.1VB Pneumatic
< 1.10-9 mbar.l/sec
< 1.10-9 mbar.l/sec
leak test port
No spring in the wetted area
for zero particle emission
AR PROCESS
STAR
®
DIMENSIONS
Materials
Parts
M4.1/ M8.1 VB S
M4.1/ M8.1 VB V
M4.1/ M8.1 VB U
Body
SS 316L
SS 316L
SS 316L VAR
Seat Material
Non-wetted
Backup diaphragms
parts
all others
Hastelloy®
Diaphragm
Elgiloy®
Refer to last page for L1, L2, L3 and L3VT
For right-hand purge only: please order under ref. M4.1-M8.1 VTD
For left-hand purge only: please order under ref. M4.1-M8.1 VTG
Parts
Upper spindle
Stainless Steel
Handle
Aluminum or
Piston
Extruded Plastic
O-rings
All others
M4-8.1VB-leaf 09-2
All others
ROTAREX
Group
Pneumatic Actuation
Low Pressure
Pneumatic
Actuator
High Pressure
Aluminum
Aluminum
NBR - PC 851
Handwheel with
on/off window
4 mounting holes M5 thread located 45°
from center line on a 1.00 (25.4) circle
ROTAREX
Group
M4-8.1VB-leaf 09-2
Manual Actuation
SELFA
Valves & Fittings
EQUIPMENT
ROTAREX
SELFA
M12
HOW TO ORDER
ROTAREX
Example :
M12 U
1
MT
2
2V1
3
I
4
/
K
5
A/B : B1/2
6
1- Valve Series
2 - Valve Actuation
M12-U
M12-V
M12-S
MT
PP2
UHP - Ra 0.15 μm Ep. (6 μin Ra)
HP/UHP - Ra 0.25 μm Ep. (10 μin Ra)
HP Version - Ra 0.4 μm non EP (15 μin Ra)
FT
7
Multi-Turn Handwheel
Pneumatically actuated
(Normally close version)
M12
3VT
3VTPS
2 ports in line
2 Ports in line, upstream purge port - left side
2 Ports in line, downstream purge port - left side
2 Ports in line, 2 purge ports upstream/
downstream/left side
2 ports in line, full passage, downstream
branch (“Te” Valve)
2 ports in line, full passage, downstream
branch, downstream purge port
I
H
6a - End Connections for 2VPEG/2VPSG/2V1P2/2VI
V 1/2-F
V 1/2-M
B 1/2
B 3/4
BWO 1/2" - (Butt Orbital Weld)
SAGALOK (Double Ring Fittings on request)
Metric BWO available on request
Purge port available as BWO 1/4” or GAZEL® 1/4” male
5 - Seat Material
K
V
P
AISI 316 L
PCTFE (Kel-F®)
PI (Vespel®)
PVDF
6b - End Connections for 3VT/3VTPS
7 - Options
B 1/2
B 3/4
B1
V1/2-F
V1/2-M
V3/4-M
V3/4-F
FT
—
CI
SAGALOK (Double Ring Fittings on request)
Branch available as GAZEL® 1/4” or BWO 1/4” or 1/2”
Purge port available as GAZEL® 1/4” male
Panel Mounting
Back Mounting
Electric Limit Switch (PP2 actuators)
GAZEL® -Female
(face seal)*
GAZEL® -Male
(face seal)*
BWO 1/2" - (Butt Orbital Weld)
BWO 1” (Butt Orbital Weld)
BWO for standard
welding heads
Configuration 3VT
M12-leaf 09-2
Configuration with
purge ports
SELF
A-V
SELFA-V
A-Valves
ROTAREX
Group
M
12
M12-leaf 09-2
2V1
2VPEG
2VPSG
2V1P2
Standard colour:
for pneumatic actuators: blue
3 - Valve Configuration
EQUIPMENT
Valves & Fittings
PA R T N U M B E R
ROTAREX
Group
SELFA
SELFA
ROTAREX
& Fittings
EQUIPMENT
ROTAREXValves
M12
M12
TECHNICAL DATA
Tied diaphragm design for positive
seat opening and retractation
Fluid Media
Max operating pressure
Assembling, testing and
packaging in
cleanroom class 10
Individual serial number
Low particle emission
Small internal volume
Fully swept flow path
Easy purgeability
High Purity and UHP, corrosive and non-corrosive gases
M12 MT manual
15 bar (215 PSI)
M12 PP2 pneumatic
15 bar (215 PSI)
Min. operating pressure
Vacuum (for manual only)
Actuator opening pressure
5 to 7 bar (75 to 105 PSI)
Temperature range
-20°C to +80°C (-4°F to 176°F)
Flow coefficient
Cv = 1,75
Certified max. Helium inboard leak rate (at max. pressure)
<10-9 mbar.l/sec
<10-9 mbar.l/sec
Certified max. Helium leak rate across the seat (at max. pressure) <1.10-9 mbar.l/sec
Reduced gas absorption and
desorption from seat material
Clean operation, no rubbing
Nominal Seat Diameter
Weight
12 mm (0.47”)
M12 MT
1,4 kg
M12 PP2
3,1 kg
Excellent flow coefficient
DIMENSIONS
Metal to Metal
sealing to
atmosphere
Fully contained Seat
DIMENSIONS
M12-Bottom view
AR PROCESS®
STAR
Parts
S
V
Body
U
Body Surface Finish < 0,4 μm (15μin Ra) non EP < 0,25 μm (10μin Ra) EP < 0,15 μm (6μin Ra) EP
Wetted parts
Elgiloy®
Diaphragms
Seat material
Non-wetted parts
®
PCTFE (Kel-F ) / PVDF or Vespel® (on request)
Elgiloy®
Backup diaphragm
All others
Manual
Actuation
Pneumatic Actuation
Upper Spindle
Stainless Steel
Parts
Handle
Aluminum
O-ring
NBR
All others
Actuator Body
Aluminum Anodized
PP2
M12-MT
ROTAREX
Group
ROTAREX
Group
M12-leaf 09-2
M12-leaf 09-2
M12-PP2
SELFA
Valves & Fittings
EQUIPMENT
ROTAREX
SELFA
M20
HOW TO ORDER
ROTAREX
Example :
M20 U
1
MT
2
2V1
3
I
4
/
K
5
A/B : B3/4
6
EQUIPMENT
Valves & Fittings
PA R T N U M B E R
FT
7
1- Valve Series
2 - Valve Actuation
M20-U
M20-V
M20-S
MT
PP2
2V1
2VPEG
2VPSG
2V1P2
2 ports in line
For “Tee” configurations please refer to M12
Standard colour for handles: white (other colours
on request)
I
H
AISI 316 L
Hastelloy (on request)
5 - Seat Material
K
V
P
6 - End Connections for 2VPEG/2VPSG/2V1P2/2VI
PCTFE (Kel-F®)
PI (Vespel®)
PVDF
V 3/4-F
V 3/4-M
B 3/4
B1
V1-M
7 - Options
FT
—
CI
Panel Mounting
Back Mounting
GAZEL® -Female
(face seal)*
GAZEL® 1”- Male (Face Seal*)
SAGALOK Double Ring Fittings on request
Purge port available as GAZEL® 1/4” male
GAZEL® -Male
(face seal)*
BWO for standard
welding heads
M20-leaf 09-2
Configuration with
purge ports
SELF
A-V
SELFA-V
A-Valves
ROTAREX
Group
M20
M
20
M20-leaf 09-2
Pneumatically actuated
(Normally close version)
UHP - Ra 0.15μm Ep. (6μin Ra)
HP/UHP - Ra 0.25μm Ep. (10μin Ra)
HP Version - Ra 0.4μm (15μin Ra) non EP
ROTAREX
Group
SELFA
SELFA
ROTAREX
& Fittings
EQUIPMENT
ROTAREXValves
M20
seat opening and retractation
M20
Fluid Media
packaging in
cleanroom class 10
Easy purgeability
Excellent flow coefficient
High and Ultra High Purity, corrosive and non-corrosive gases
M20 MT manual
15 bar (215 PSI)
M20 PP2 pneumatic
15 bar (215 PSI)
Vacuum (for manual only)
5 to 7 bar (75 to 105 PSI)
Temperature range
-20°C to + 80°C (-4°F to 176°F)
Flow Coefficient
Cv = 3,5
< 10-9 mbar.l/sec
< 10-9 mbar.l/sec
Certified max. Helium across the seat leak rate (at max. pressure)
< 1.10-9 mbar.l/sec
20 mm (0.79”)
DIMENSIONS
Metal to Metal
sealing to
atmosphere
Fully contained
Seat
DIMENSIONS
M20-Bottom view
STAR
AR PROCESS®
Parts
S
Body
Body Surface Finish
Wetted parts
Non-wetted parts
V
U
<0,4μm(15μin Ra)nonEP < 0,25 μm (10μin Ra) EP
< 0,15 μm (6μin Ra) EP
Diaphragms
Elgiloy®
Seat material
PCTFE (Kel-F®) / PVDF or Vespel® (on request)
Elgiloy®
Backup diaphragm
All others
M20-PP2
Actuation
Pneumatic Actuation
Upper Spindle
Stainless Steel
Parts
Handle
Aluminum
O-ring
NBR
All others
Actuator Body
Aluminum Anodized
PP2
M20-MT
ROTAREX
Group
ROTAREX
Group
M20-leaf 09-2
M20-leaf 09-2
Manual
SELFA
Valves & Fittings
EQUIPMENT
ROTAREX
SELFA
M20 L
T
LT
HOW TO ORDER
ROTAREX
Example :
M20LT U
1
MT
2
2V1
3
I
4
/
K
5
A/B : B3/4
6
EQUIPMENT
Valves & Fittings
PA R T N U M B E R
CI
7
1- Valve Series
2 - Valve Actuation
M20LT-U UHP - Ra 0.15m Ep. (6in Ra)
M20LT-V HP/UHP - Ra 0.25m Ep. (10in Ra)
M20LT-S HP Version - Ra 0.4m (15in Ra) non EP
MT
PP2
PP2NO
2 ports in line
I
H
5 - Seat Material
K
V
P
PCTFE (Kel-F®)
PI (Vespel®)
PVDF
AISI 316 L
Hastelloy (on request)
6 - End Connections for 2VPEG/2VPSG/2V1P2/2VI
7 - Options
—
CI
Back Mounting
B 1/2
V 1/2-F
V 1/2-M
B 3/4
V 3/4-F
V 3/4-M
B1
SAGALOK Double Ring Fittings on request
V 1/4 MI
GAZEL® 1/4" - Male fix(Face Seal*) Purge Port
V 1/4 MI* GAZEL® 1/4" - Male fix(Face Seal*) Purge Port
with SS316L plug
GAZEL® -Female
(face seal)*
GAZEL® -Male
(face seal)*
BWO for standard
welding heads
M20lt-leaf 10-9
Configuration with
purge ports
CEODEUX S.A. B.P.19 - L-7505 Lintgen, G.-D. of Luxembourg
ROTAREX
Group
Tel. +352 - 32 78 32 - 1, fax +352 - 32 78 32 322, www.rotarex.com, [email protected]
FOR LONG CYCLE LIFE TIME
HP AND UHP APPLICATIONS
M
20 L
T
LT
M20lt-leaf 10-9
2V1
2VPEG
2VPSG
2V1P2
Standard colour for handles: BLUE (other colours
on request)
M20 LT
*All GAZEL® Face Seals are VCR ® compatible. VCR ® is a registered trade mark of SWAGELOK COMPANY, HASTELLOY® is a registered trade mark of CABOT Corp. , Kel-F®
is a registered trade mark of 3M company, Vespel® is a registered trade mark of DUPONT
Pneumatically actuated(NC)
Pneumatically actuated(NO)
ROTAREX
Group
SELFA
SELFA
ROTAREX
& Fittings
EQUIPMENT
ROTAREXValves
M20 L
T
LT
M20 L
T
LT
seat opening and retraction
Long Cycle Life Time
(up to 7 mio. cycles)
threaded leakage
detection port
packaging in
cleanroom class 10
(threadless, springless design)
Fluid Media
High and Ultra High Purity, corrosive and non-corrosive gases
15 bar (215 PSI)
Vacuum (for manual and PP2)
5 to 7 bar (75 to 105 PSI)
Temperature range
-20°C to + 80°C (-4°F to 176°F)
Flow Coefficient
Cv = 1,75
< 10-9 mbar.l/sec
Certified max. Helium outboard leak rate (at max. pressure) < 10-9 mbar.l/sec
< 1.10-9 mbar.l/sec
20 mm (0.79”)
Easy purgeability
DIMENSIONS
Metal to Metal
sealing to
atmosphere
Fully contained
Seat
DIMENSIONS
Air connector 1/8"NPT
M20LT-Bottom view
AR PROCESS®
STAR
142 (≈5.59")
58 (≈2.28")
S
V
Body
< 0,4 m (15in Ra) non EP
< 0,25 m (10in Ra) EP
Diaphragm
Seat material
Non-wetted parts
UNS R30003
PCTFE (Kel-F®) / PVDF or Vespel® (on request)
Backup diaphragm
All others
leakage
detection port
< 0,15 m (6in Ra) EP
UNS R30003
17,5
Body Surface Finish
Wetted parts
U
(≈0.69")
Parts
50 (≈1.96")
M20LT-PP2
Actuation
Pneumatic Actuation
Upper Spindle
Stainless Steel
Actuator Body
Anodized Aluminum
Handle
Aluminum
Pistons
Stainless steel and Aluminum
All others
O-ring
NBR
All others
M20LT-MT
ROTAREX
Group
ROTAREX
Group
M20lt-leaf 10-9
M20lt-leaf 10-9
Manual
SELFA
Valves & Fittings
EQUIPMENT
ROTAREX
SELFA
SI 15
HOW TO ORDER
ROTAREX
Example :
SI 15U
1
2V1
2
A
3
/
K
4
8b
5
EQUIPMENT
Valves & Fittings
PA R T N U M B E R
A/B : V-M
6
1 - Serie & Sur face Finish
2 - Ports Configurations
SI 15 U
SI 15 V
SI 15 S
2V1
2 ports in line
4 - Seat Material
A
I
H
N
5 - Outlet Regulated Pressure
8b
8 bar - 120 psi
Note: Inlet Pressure = upto 25 bar (360 psi)
NBR
6 - End Connections
V-F
V-M
V-FI
GAZEL® 1/2" - Female (face seal)*
GAZEL® 1/2" - Male (face seal)*
GAZEL® 1/2" - Internal (face seal)*
SI15-leaf 09-2
Configurations
ROTAREX
Group
HIGH FLOW DIAPHRAGM
PRESSURE REGULATOR
FOR HP & UHP APPLICATIONS
SELF
A-V
SELFA-V
A-Valves
SI
SI 15
SI15-leaf 09-2
AISI 316L, VAR (on request)
AISI 316L
SI 15
See below for other ports configurations
Ra 0,15μm Ep. (6μin Ra)
Ra 0,4μm nonEP(15μin Ra)
ROTAREX
Group
SELFA
SELFA
ROTAREX
& Fittings
EQUIPMENT
ROTAREXValves
SI 15
The SI 15 Regulator was created in response to the industry’s needs for
source gas service, i.e. gas cabinets.
High Flow Applications (tipically 1/2")
SI 15
for specialty
• The balanced valve minimizes the effect of inlet pressure fluctuations on outlet pressure and reduces the efforts on the seat to
increase life time of the regulator
• Precise control of the gas discharge with minimum deviation caused by the supply pressure effect.
• Excellent performance characteristics
• A unique spherical ball pressure pad to give ultra smooth delivery pressure adjustment
• Delivery pressure of 8 bar (120 psi)
in cleanroom Cl. 10
Ergonomic Design
Fluid Media
Inlet pressure
Outlet pressure
8 bar (120 PSI)
25 bar (360 PSI)
Temperature range
-20°C to + 60°C (-2F to 140F)
Nominal Flow
840 slpm (N2)
< 1.10-8 mbar.l/sec
Certified max. Helium outboard leak rate (at max. pressure) < 1.10-8 mbar.l/sec
< 1.10-8 mbar.l/sec
Number of ports
2, 3, 4, 5 or 6
Controlled (PC)
electropolishing
for better corrosion resistance
FLOW CURVES
Spherical ball for ultra
smooth control
2,3,4 or 6 ports options
available
Sealed bonnet for
extra protection
Seat design for high flow uses
Minimal wetted
surfaces for
optimal purging
Excellent response
(droop, hysteresis,
creep)
AR PROCESS®
STAR
Wetted parts
DIMENSIONS
Parts
Materials
Body
AISI 316L, VAR, Hastelloy®
Diaphragm
AISI 304
Seat
NBR
Poppet
Non-wetted parts Bonnet
Nickel Plated Brass
Handle
Extruded Plastic
Others
Stainless Steel or others
S U R FA C E F I N I S H
ROTAREX
Group
V: < Ra 0,25μm Ep. (10μin Ra)
S:< Ra 0,4μm nonEP(15μin Ra)
ROTAREX
Group
SI15-leaf 09-2
SI15-leaf 09-2
U: < Ra 0,15μm Ep. (6μin Ra)
SELFA
Valves & Fittings
EQUIPMENT
ROTAREX
SELFA
SIR100
HOW TO ORDER
ROTAREX
Example :
SIR 100 U
1
2V1
2
A
3
/
K
4
7b
5
EQUIPMENT
Valves & Fittings
PART NUMBER
A/B:V1/4M
6
1 - Series & Surface finish
2 - Ports configurations
SIR 100 U - Ra 0.15μm Ep. (6μin Ra)
SIR 100 V - Ra 0.25μm Ep. (10μin Ra)
SIR 100 S - Ra 0.4μm non Ep. (15μin Ra)
2V1
2 ports in line
SIR 100
DIAPHRAGM PRESSURE REGULATOR
6 - End Connections
5 - Outlet regulated pressure
2b
2 bar - 30 psig
4b
4 bar - 60 psig
7b
7 bar - 100 psig
Inlet pressure upto 50 bar (725 psig)
V 1/4-F
V 1/4-M
V 1/4-FI
B 1/4
B6
NPT FI
GAZEL® 1/4" - Internal (Face Seal*)
1/4 NPT - Inlet threads
SIR100-leaf 09-2
Configurations
ROTAREX
Group
SELF
A-V
SELFA-V
A-Valves
SIR
AISI 316L, VAR
AISI 316L
Hastelloy® on request
PCTFE (Kel-F®)
PI (Vespel®)
PVDF
100
SIR100-leaf 09-2
A
I
H
K
V
P
4 - Seat Material
ROTAREX
Group
SELFA
SELFA
ROTAREX
& Fittings
EQUIPMENT
ROTAREXValves
SIR100
The SIR 100 Regulator was created in response to the industry’s needs for a low pressure non tied
diaphragm regulator for specialty source gas service, i.e. gas cabinets. The design and material
of construction, plus some unique features make it an ideal choice for gas source applications
with the reactive and hazardous gases the Semiconductor and Allied Industries use.
in cleanroom Cl. 10
Ergonomic Design
Controlled (PC)
electropolishing for better
corrosion resistance
smooth control
2,3,4,5, or 6 ports options
available
Metal to metal seal
to atmosphere
SIR100
Fluid Media
Inlet pressure
50 bar (725 PSI)
Outlet pressure
2 - 4 -7 bar (30 - 60 - 100 PSI)
Temperature range
-20°C to + 65°C (-4°F to 150°F)
Flow Coefficient
CV = 0.2
< 1.10-9 mbar.l/sec
Cerified max. Helium outboard leak rate (at max. pressure)
< 1.10-9 mbar.l/sec
Cerified max. Helium across the seat leak rate (at max. pressure)
< 1.10-9 mbar.l/sec
Number of ports
2, 3, 4, 5 or 6
FLOW CURVES
diaphragm counter
balance springs
Minimal wetted surfaces
for optimal purging
Excellent response at low
pressures (droop, hysteresis,
creep)
Gas specific solutions
(Body and seat materials)
AR PROCESS®
STAR
Wetted Parts
Non-wetted parts
DIMENSIONS
Parts
Materials
Body
AISI 316L, VAR
Diaphragm
Hastelloy®
Seat
PCTFE (Kel-F®) / PI (Vespel®) /PVDF
Poppet
AISI 316L, VAR
Bonnet
Nickel Plated Brass
Handle
Extruded Plastic
Others
ROTAREX
Group
V: <Ra 0.25μm Ep. (10μin Ra)
S: <Ra 0.4μm non Ep. (15μin Ra)
ROTAREX
Group
SIR100-leaf 09-2
SIR100-leaf 09-2
U: <Ra 0.15μm Ep. (6μin Ra)
SELFA
Valves & Fittings
EQUIPMENT
ROTAREX
SELFA
SIR200
HOW TO ORDER
ROTAREX
Example :
SIR 200 U
1
2V1
2
A
3
/
K
4
7b
5
EQUIPMENT
Valves & Fittings
PART NUMBER
A/B:V1/4M
6
1 - Series & Surface finish
2 - Ports configurations
SIR 200 U - Ra 0.15m Ep. (6in Ra)
SIR 200 V - Ra 0.25m Ep. (10in Ra)
SIR 200 S - Ra 0.4m non Ep. (15in Ra)
2V1
2 ports in line
SIR 200
DIAPHRAGM PRESSURE REGULATOR
6 - End Connections
5 - Outlet regulated pressure
2b
2 bar - 30 psig
4b
4 bar - 60 psig
7b
7 bar - 100 psig
Inlet pressure upto 200 bar (2900 psi)
V 1/4-F
V 1/4-M
V 1/4-FI
B 1/4
B6
NPT FI
GAZEL® 1/4" - Internal (Face Seal*)
1/4 NPT - Inlet threads
SIR200-leaf 10-5
Configurations
ROTAREX
Group
SELF
A-V
SELFA-V
A-Valves
SIR
AISI 316L, VAR
AISI 316L
Hastelloy® on request
PCTFE (Kel-F®)
PI (Vespel®)
PVDF
200
SIR200-leaf 10-5
A
I
H
K
V
P
4 - Seat Material
ROTAREX
Group
SELFA
SELFA
ROTAREX
& Fittings
EQUIPMENT
ROTAREXValves
SIR200
The SIR 200 Regulator was created in response to the industry’s needs for a high pressure non
tied diaphragm regulator for specialty source gas service, i.e. gas cabinets. The design and
material of construction, plus some unique features make it an ideal choice for gas source
applications with the reactive and hazardous gases the Semiconductor and Allied Industries
use.
in cleanroom Cl. 10
SIR200
Fluid Media
Inlet pressure
200 bar (2900 PSI)
Outlet pressure
2 - 4 -7 bar (30 - 60 - 100 PSI)
Temperature range
-20°C to + 65°C (-4°F to 150°F)
Flow Coefficient
CV = 0.2
< 1.10-9 mbar.l/sec
Cerified max. Helium outboard leak rate (at max. pressure) < 1.10-9 mbar.l/sec
Ergonomic Design
Controlled (PC)
electropolishing for better
corrosion resistance
smooth control
2,3,4,5, or 6 ports options
available
Metal to metal seal
to atmosphere
Cerified max. Helium across the seat leak rate (at max. pressure)
< 1.10-9 mbar.l/sec
Number of ports
2, 3, 4, 5 or 6
FLOW CURVES
diaphragm counter
balance springs
Minimal wetted surfaces
for optimal purging
Excellent response at low
pressures (droop, hysteresis,
creep)
(Body and seat materials)
AR PROCESS®
STAR
Wetted Parts
Non-wetted parts
DIMENSIONS
Parts
Materials
Body
AISI 316L, VAR
Diaphragm
Hastelloy®
Seat
PCTFE (Kel-F®) / PI (Vespel®) /PVDF
Poppet
AISI 316L, VAR
Bonnet
Nickel Plated Brass
Handle
Extruded Plastic
Others
ROTAREX
Group
V: <Ra 0.25m Ep. (10in Ra)
S: <Ra 0.4m non Ep. (15in Ra)
ROTAREX
Group
SIR200-leaf 10-5
SIR200-leaf 10-5
U: <Ra 0.15m Ep. (6in Ra)
SELFA
Valves & Fittings
EQUIPMENT
ROTAREX
HOW TO ORDER
SELFA
SI 220
ROTAREX
Example :
SI 220U
1
2V1
2
A
3
/
K
4
10 b
5
EQUIPMENT
Valves & Fittings
PA R T N U M B E R
A/B : V-3/8 F
6
SI 220 U
SI 220 V
SI 220 S
2V1
Ra 0,4μm nonEP(15μin Ra)
2 ports in line
SI 220
DIAPHRAGM
PRESSURE REGULATOR
AISI 316L, VAR
AISI 316L
4 - Seat Material
K
PCTFE (Kel-F®)
5 - Outlet regulated Pressure
3b
8b
10b
15b
25b
50b
3 bar - 45 PSI
8 bar - 116 PSI
10 bar - 145 PSI
15 bar - 217 PSI
25 bar - 365 PSI
50 bar - 725 PSI
Note : Inlet Pressure: upto 240 bar (3500 PSI)
6 - End Connections
V-1/4 F
V-3/8 F
V 1/4 M
V-3/8 M
V-FI
GAZEL® 1/4" - Female (face seal)
GAZEL® 1/4" - Male (face seal)
GAZEL® 1/4" - Internal Female (face seal)
SI220-leaf 09-2
Configurations
SELF
A-V
SELFA-V
A-Valves
ROTAREX
Group
SI
SI 220
SI220-leaf 09-2
A
I
H
ROTAREX
Group
SELFA
SELFA
ROTAREX
& Fittings
EQUIPMENT
ROTAREXValves
SI 220
The SI 220 Regulator was created in response to the industry’s need for a Highflow, High Pressure, Springless, Tied Diaphragm
Regulator for specialty source gas service, i.e. gas cabinets.The design and materials of construction, plus some unique features make it an
ideal choice for gas source applications with reactive and hazardous gases the Semiconductor and Allied Industries use.
• Unique features include a special leak test port that enables the diaphragm seal to be outboard leak tested ‹10-9 mbar.l/sec
range at high pressure.
• Counter balance springs outside the gas stream to ensure the unit functions correctly with downstream vacuum and upstream
high pressure
• Choice of delivery pressure: 3, 8, 10, 15, 25 or 50 bar / 45, 116, 145, 217, 365 or 725 psi
in cleanroom Cl. 10
Ergonomic Design
Controlled (PC)
electropolishing
smooth control
SI 220
TECHNICAL DATA
Fluid Media
Inlet pressure
240 bar (3500 PSI)
Outlet pressure
3 - 8 - 10 - 15 - 25 - 50 bar (45-116-145-217-365-725 PSI)
Temperature range
-20°C to + 60°C (-2F to 140F)
Nominal Flow
170 slpm (N2)
Flow Coefficient (Cv)
CV = 0,2
< 1.10-9 mbar.l/sec
< 1.10-9 mbar.l/sec
Number of ports
2, 3, 4, 5 or 6
FLOW CURVES
Metal to metal seal to
Atmosphere
available
Sealed bonnet for
extra protection
diaphragm counter
balance springs
Minimal wetted surfaces for
optimal purging
Excellent response at high
and low pressures (droop,
hysteresis, creep)
(Body and Seat Materials)
AR PROCESS®
STAR
Wetted parts
DIMENSIONS
Parts
Materials
Body
Diaphragm
Hastelloy®
Seat
PCTFE (Kel-F®)
Poppet
Nickel Plated Brass
Handle
Extruded Plastic
Others
ROTAREX
Group
ROTAREX
Group
SI220-leaf 09-2
SI220-leaf 09-2
SELFA
Valves & Fittings
EQUIPMENT
ROTAREX
SELFA
SI 220 TRITON
HOW TO ORDER
ROTAREX
Example : SI 220 Triton U
1
2V1
2
A
3
/
K
4
10 b
5
EQUIPMENT
Valves & Fittings
PA R T N U M B E R
A/B : V-3/8 F
6
SI 220 Triton U
SI 220 Triton V
SI 220 Triton S
2V1
Ra 0,15m Ep. (6in Ra)
Ra 0,25m Ep. (10in Ra)
Ra 0,4m nonEP(15in Ra)
2 ports in line
SI 220 TRITON
TIED DIAPHRAGM PRESSURE REGULATOR
FOR HP & UHP NF3 AND REACTIVE GAS
APPLICATIONS
4 - Seat Material
AISI 316L, VAR
AISI 316L
PCTFE (Kel-F®)
PVDF (optional)
PI (Vespel® optional)
K
P
V
3b
8b
10b
15b
25b
50b
6 - End Connections
3 bar - 45 PSI
8 bar - 116 PSI
10 bar - 145 PSI
15 bar - 217 PSI
25 bar - 365 PSI
50 bar - 725 PSI
V-1/4 F
V-3/8 F
V 1/4 M
V-3/8 M
V-FI
Note : Inlet Pressure: up to 240 bar (3500 PSI)
GAZEL® 1/4" - Internal Female (face seal)
for gauge connections only
OUTLET - INLET DESIGN
A
C
B
1/4"
GAZEL male fix
47 mm
1.85"
3/8"
51 mm
2.0"
GAZEL male swivel
51 mm
2.0"
60.5 mm
GAUGE CONNECTION
2.38"
D
GAZEL female
47 mm
60.5 mm
1.85"
2.38"
GAZEL female internal
1/4" 14.4 mm
0.57"
SI220tr-leaf 10-8
Configurations
CEODEUX S.A. B.P. 19 - L-7505 Lintgen, G.-D. of Luxembourg
Tel. +352 - 32 78 32 - 1, Fax +352 - 32 78 32 322, www.rotarex.com, [email protected]
ROTAREX
Group
SI
220 TRITON
SI220tr-leaf 10-8
A
I
H
*All GAZEL® Face Seals are VCR ® compatible. VCR ® is a registered trade mark of SWAGELOK COMPANY., HASTELLOY® is a registered trade mark of CABOT Corp. , Kel-F®
is a registered trade mark of 3M company, Vespel® is a registered trade mark of DUPONT
ROTAREX
Group
SELFA
SELFA
ROTAREX
& Fittings
EQUIPMENT
ROTAREXValves
F E A T U R E a u n i q u e p r o v e n d e s i g n SI 220 TRITON
The SI 220 TRITON Regulator was created in response to the industry’s need for a Highflow, High Pressure, Springless, Tied Diaphragm
Regulator for specialty source gas service, i.e. gas cabinets.The design and materials of construction, plus some unique features make it an
ideal choice for gas source applications with reactive and hazardous gases the Semiconductor and Allied Industries use.
• Unique features include a special leak test port that enables the diaphragm seal to be outboard leak tested ‹10-9 mbar.l/sec
range at high pressure.
• Counter balance springs outside the gas stream to ensure the unit functions correctly with downstream vacuum and upstream
high pressure
• Choice of delivery pressure: 3, 8, 10, 15, 25 or 50 bar / 45, 116, 145, 217, 365 or 725 psi
in cleanroom Cl. 10
Ergonomic Design
Controlled (PC)
electropolishing
smooth control
SI 220 TRITON
TECHNICAL DATA
Fluid Media
Standard, High and Ultra High Purity, corrosive and oxydizing gases (NF3, F2, ...)
Inlet pressure (PCTFE seat)
240 bar (3500 PSI)
Inlet pressure (PVDF seat)
25 bar (365 PSI)
Outlet pressure
3 - 8 - 10 - 15 - 25 - 50 bar (45-116-145-217-365-725 PSI)
Temperature range
-20°C to + 60°C (-2°F to 140°F)
Nominal Flow
90 slpm (N2)
CV = 0,1
< 1.10-9 mbar.l/sec
< 1.10-9 mbar.l/sec
< 1.10-6 mbar.l/sec
Number of ports
2, 3, 4, 5 or 6
Springless & threadless
Atmosphere
2,3,4,5 or 6 ports options
available
Sealed bonnet for
extra protection
diaphragm counter
balance springs
easy purging
hysteresis, creep)
AR PROCESS®
STAR
Parts
Materials
Body
Diaphragm
Hastelloy®
Seat
PCTFE (Kel-F®), on request: PI(Vespel®) or PVDF
Poppet
AISI 316L, on request: Hastelloy®
Chrome Plated Brass
Aluminium
Others
17.5
Handle
32
≈1.26"
standard:
≈0.69"
2 holes M5x7-6H
160
Wetted parts
DIMENSIONS
≈6,3"
54
≈2,13"
ROTAREX
Group
ROTAREX
Group
SI220tr-leaf 10-8
SI220tr-leaf 10-8
94 mm ≈3.7"
102 mm ≈4.0"
121 mm ≈4.75"
SELFA
Valves & Fittings
EQUIPMENT
ROTAREX
SELFA
SI 240 / 260
HOW TO ORDER
ROTAREX
Example :
SI 240 U
1
2V1
2
A
3
/
K
4
7b
5
EQUIPMENT
Valves & Fittings
PA R T N U M B E R
A/B : V-M
6
SI 240/260 U Ra 0,15μm Ep. (6μin Ra)
SI 240/260 V Ra 0,25μm Ep. (10μin Ra)
SI 240/260 S Ra 0,4μm nonEP(15μin Ra)
2V1
2 ports in line
SI 240 /260
SPRINGLESS TIED DIAPHRAGM
PRESSURE REGULATOR
FOR UHP APPLICATIONS
AISI 316L, VAR
AISI 316L
4 - Seat Material
K
V
P
PCTFE (Kel-F®)
PI (Vespel ®)
PVDF
2b
2 bar - 30 PSI
4b
4 bar - 60 PSI
7b
7bar - 100 PSI
Note : Inlet Pressure: upto 240 bar (3500 PSI)
6 - End Connections
V-F
V-M
V-FI
GAZEL® 1/4" - Female (face seal)*
GAZEL® 1/4" - Male (face seal)*
GAZEL® 1/4" - Internal (face seal)*
SI240-260 leaf 09-2
Configurations
ROTAREX
Group
SELF
A-V
SELFA-V
A-Valves
SI
SI 240
SI 260
SI240-260 leaf 09-2
A
I
H
ROTAREX
Group
SELFA
SELFA
ROTAREX
& Fittings
EQUIPMENT
ROTAREXValves
SI 240 / 260
The SI
240 Regulator was created in response to the industry’s need for a High Pressure, Springless, Tied Diaphragm Regulator
and the SI 260 Regulator for a High Flow, High Pressure, Springless, Tied Diaphragm Regulator for specialty source gas service,
i.e. gas cabinets.The design and materials of construction, plus some unique features make it an ideal
choice for gas source applications with reactive and hazardous gases the Semiconductor and Allied Industries use.
• Unique features include a special leak test port that enables the diaphragm seal to be outboard leak tested ‹10-9 mbar.l/sec range
at high pressure.
• Counter balance springs outside the gas stream to ensure the unit functions correctly with downstream vacuum and upstream high
pressure
• Choice of delivery pressure: 2, 4 or 7 bar / 30, 60 or 100 psi
The SI
The SI
SI 240 / 260
240 regulator is designed with minimum face to face dimensions, to meet the requirements of all gas system manufacturers.
260 regulator is designed for high flow rates of HCl and N2O etc.
in cleanroom Cl. 10
Ergonomic Design
Controlled (PC)
electropolishing
Fluid Media
Inlet pressure
240 bar (3500 PSI)
Outlet pressure
2 - 4 - 7 bar (30 - 60 - 100 PSI)
Temperature range
-20°C to + 80°C (-2F to 176F)
Nominal Flow
150 slpm (N2)
SI 240: CV = 0,09 / SI 260: CV = 0,2
< 1.10-9 mbar.l/sec
< 1.10-9 mbar.l/sec
Number of ports
2, 3, 4, 5 or 6
FLOW CURVES
atmosphere
smooth control
available
Sealed bonnet for
extra protection
diaphragm counter
balance springs
optimal purging
hysteresis, creep)
SI 240
SI 260
AR PROCESS®
STAR
Parts
Wetted parts
DIMENSIONS
Materials
Body
Diaphragm
Hastelloy®
Seat
PCTFE (Kel-F®) / PI (Vespel®) / PVDF
Poppet
Nickel Plated Brass
Handle
Extruded Plastic
Others
ROTAREX
Group
Rotarex UK Ltd
Redland Close, Coventry, West Midlands, CV2 2NP
Tel: 024 7662 2675 Fax: 024 7662 1971
Email: [email protected]
ROTAREX
Group
SI240-260 leaf 09-2
SI240-260 leaf 09-2

rotarex equipment

Transcription

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