Information on Lufran Ultra Pure

Transcription

Information on Lufran Ultra Pure
®
LUFRAN UPDI Features and Benefits
Process Technology introduces the next generation ultrapure water heater
designed for the next generation high purity semiconductor and flat panel
display manufacturing processes. This updated Lufran water heater offers
the ultimate in cleanliness for heating UPDI (ultrapure deionized water).
With thousands of heater installations worldwide, the Lufran boasts proven
technology for UPDI heating applications and is suitable for the most
stringent high purity specifications. It is constructed with all PTFE and
PVDF wetted parts for ultra-low particle count processes. Its patented
“purged” resistive element design offers exceptional MTBF of nearly ten
years and significantly lower maintenance costs than other ultrapure water
heaters on the market.
This heater is Class 100 cleanroom assembled, third party certified to
SEMI and UL standards, and optionally CE compliant. Our standard
patented DAC™ software provides accurate temperature control for
different flow and temperature requirements and sizes up to 312kW are
available.
LUFRAN UPDI Heater Specifications
HEATER: Patented resistive heating system. DAC™
Demand Anticipation Control) for high temperature
accuracy.
SIZES: 24kW to 312kW standard. Voltages: Up to 600
volt (three phase) available. Heaters can be utilized in
combination.
TEMPERATURE LIMIT: 95°C, depending on operating
conditions.
TEMPERATURE ACCURACY: +/-0.3°C, depending on
operating conditions.
FLOW RATE: 1 LPM (.25 GPM) to 200 LPM (50 GPM).
EFFICIENCY: >99%
PRESSURE RATING: 100 PSIG (6.89 kPa) maximum
operating. Able to handle difficult applications: Capable of
temperatures up to 95° C and pressures up to 100 PSIG at
essentially any flow rate.
MTBF: 9.39 years. Documented, real-world “mean time
between failures” of nearly 10 YEARS! Uptimes of greater
than 99% can be expected.
TEMPERATURE REGULATING SYSTEM: Distributive
zero crossing SSR switched by PLC based DAC™
“Demand Anticipation Control”.
TEMPERATURE SENSORS: “J” type thermocouple
(process), “E” type (element over-temperature), or
customer specified. Redundant safety features ensure
long, trouble-free life.
WETTED SURFACES:
• Heating elements: continuous virgin PTFE
Polytetrafluoroethylene (82%).
•
Chamber and plumbing: PVDF Polyvinylidine
Fluoride (18%)
•
Chemraz® o-rings
•
No wetted metal or coated metal parts
HEATING ELEMENT: Patented design utilizing a precision
resistance wire, 15 w/in² (2 w/cm²) watt density.
ELEMENT GAS PURGE: Removes permeation to extend
element life expectancy. Monitors integrity of element
tubing.
EXHAUST VENTILATION: Not required.
STANDARD FEATURES:
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DAC™ “Demand Anticipation Control” (run by a PLC.
EMO circuit (local and remote)
Ground fault protection (GFP)
Fused 24 VAC control circuitry
TUV certified to UL 499 and SEMI S2/S3/S8, CE
compliant, RoHS compliant
Disconnect
Data logging
Remote Interface
Powder coated cabinet with sump leak detection
Capacitive liquid level sensor for element protection
Heater over temp circuit with independent limit
control
Humidity monitor to verify element tubing integrity
Purge flow switch to verify element purge
System pressure monitor
Process high temperature alarm
PVDF mechanical pressure relief valve set @ 100
PSIG (689.5 kPa)
OPTIONS:
• Extended Warranty
• Custom Communication Protocol
DAC™ (Demand Anticipation Control)
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Extremely precise temperature control and stability: Utilizes a patented temperature/flow algorithm to calculate
exact heater output requirements. Calculates and compares:
• Required percentage power
• Inlet fluid temperature.
• Flow rate.
• Actual power applied.
• Low temperature boost.
• High temperature shut-off.
Quick reacting: Responds instantly to flow changes rather than simply monitoring outlet temperature.
Better temperature stability: Responds quickly to recipe (flow and temperature) changes.
Water conservation: Faster heat up and recovery means less water usage.
Friendly operator interface (User friendly HMI): Touch pad display with easy to understand commands.
DAC™ Control Compared to Typical PID Control
90
TYPICAL PID CONTROL
+/- 0.3oC STEADY STATE
80
+5oC
70
-5oC
TEMPERATURE (c)
60
DACTM CONTROL
50
40
30
20
PID
10
DAC
FLOW RATE (LPM)
0
INLET TEMPERATURE
0
120
240
360
480
600
720
840
960
1080
1200
1320
1440
1560
1680
1800
TIME (seconds)
Cabinet Dimensions
32.20in
[818mm]
20.00in
[508mm]
32.20in
[818mm]
28.00in
[711mm]
XXX VOLTS
XXX VOLTS
XXX VOLTS
by
by
WARNING
HAZARDOUS VOLTAGE.
Contact may cause electric
shock or burn.
Turn off and lock out
systems before servicing.
FIGURE A: 24kW - 78kW
HEATER CABINET
(For standard 380V-600V models)
47.00in
[1194mm]
41.26in
[1048mm]
86.12in
[2187mm]
by
by
WARNING
HAZARDOUS VOLTAGE.
Contact may cause electric
shock or burn.
Turn off and lock out
systems before servicing.
FIGURE B: 90kW - 156kW
HEATER CABINET
(For standard 380V-600V models)
86.12in
[2187mm]
WARNING
WARNING
HAZARDOUS VOLTAGE.
Contact may cause electric
shock or burn.
Turn off and lock out
systems before servicing.
HAZARDOUS VOLTAGE.
Contact may cause electric
shock or burn.
Turn off and lock out
systems before servicing.
FIGURE C: 157kW - 312kW
HEATER CABINET
(For standard 380V-600V models)
86.12in
[2187mm]
7010 LINDSAY DRIVE
MENTOR, OHIO 44060 ♦ USA
PHONE: (1) 440-974-1300
FAX: (1) 440-974-9561
USA/CAN: 800-621-1998
CERTIFIED TO ISO 9001:2008, WITH DESIGN
WWW.PROCESSTECHNOLOGY.COM

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