Information on Lufran Ultra Pure
Transcription
Information on Lufran Ultra Pure
® LUFRAN UPDI Features and Benefits Process Technology introduces the next generation ultrapure water heater designed for the next generation high purity semiconductor and flat panel display manufacturing processes. This updated Lufran water heater offers the ultimate in cleanliness for heating UPDI (ultrapure deionized water). With thousands of heater installations worldwide, the Lufran boasts proven technology for UPDI heating applications and is suitable for the most stringent high purity specifications. It is constructed with all PTFE and PVDF wetted parts for ultra-low particle count processes. Its patented “purged” resistive element design offers exceptional MTBF of nearly ten years and significantly lower maintenance costs than other ultrapure water heaters on the market. This heater is Class 100 cleanroom assembled, third party certified to SEMI and UL standards, and optionally CE compliant. Our standard patented DAC™ software provides accurate temperature control for different flow and temperature requirements and sizes up to 312kW are available. LUFRAN UPDI Heater Specifications HEATER: Patented resistive heating system. DAC™ Demand Anticipation Control) for high temperature accuracy. SIZES: 24kW to 312kW standard. Voltages: Up to 600 volt (three phase) available. Heaters can be utilized in combination. TEMPERATURE LIMIT: 95°C, depending on operating conditions. TEMPERATURE ACCURACY: +/-0.3°C, depending on operating conditions. FLOW RATE: 1 LPM (.25 GPM) to 200 LPM (50 GPM). EFFICIENCY: >99% PRESSURE RATING: 100 PSIG (6.89 kPa) maximum operating. Able to handle difficult applications: Capable of temperatures up to 95° C and pressures up to 100 PSIG at essentially any flow rate. MTBF: 9.39 years. Documented, real-world “mean time between failures” of nearly 10 YEARS! Uptimes of greater than 99% can be expected. TEMPERATURE REGULATING SYSTEM: Distributive zero crossing SSR switched by PLC based DAC™ “Demand Anticipation Control”. TEMPERATURE SENSORS: “J” type thermocouple (process), “E” type (element over-temperature), or customer specified. Redundant safety features ensure long, trouble-free life. WETTED SURFACES: • Heating elements: continuous virgin PTFE Polytetrafluoroethylene (82%). • Chamber and plumbing: PVDF Polyvinylidine Fluoride (18%) • Chemraz® o-rings • No wetted metal or coated metal parts HEATING ELEMENT: Patented design utilizing a precision resistance wire, 15 w/in² (2 w/cm²) watt density. ELEMENT GAS PURGE: Removes permeation to extend element life expectancy. Monitors integrity of element tubing. EXHAUST VENTILATION: Not required. STANDARD FEATURES: • • • • • • • • • • • • • • • • DAC™ “Demand Anticipation Control” (run by a PLC. EMO circuit (local and remote) Ground fault protection (GFP) Fused 24 VAC control circuitry TUV certified to UL 499 and SEMI S2/S3/S8, CE compliant, RoHS compliant Disconnect Data logging Remote Interface Powder coated cabinet with sump leak detection Capacitive liquid level sensor for element protection Heater over temp circuit with independent limit control Humidity monitor to verify element tubing integrity Purge flow switch to verify element purge System pressure monitor Process high temperature alarm PVDF mechanical pressure relief valve set @ 100 PSIG (689.5 kPa) OPTIONS: • Extended Warranty • Custom Communication Protocol DAC™ (Demand Anticipation Control) • • • • • Extremely precise temperature control and stability: Utilizes a patented temperature/flow algorithm to calculate exact heater output requirements. Calculates and compares: • Required percentage power • Inlet fluid temperature. • Flow rate. • Actual power applied. • Low temperature boost. • High temperature shut-off. Quick reacting: Responds instantly to flow changes rather than simply monitoring outlet temperature. Better temperature stability: Responds quickly to recipe (flow and temperature) changes. Water conservation: Faster heat up and recovery means less water usage. Friendly operator interface (User friendly HMI): Touch pad display with easy to understand commands. DAC™ Control Compared to Typical PID Control 90 TYPICAL PID CONTROL +/- 0.3oC STEADY STATE 80 +5oC 70 -5oC TEMPERATURE (c) 60 DACTM CONTROL 50 40 30 20 PID 10 DAC FLOW RATE (LPM) 0 INLET TEMPERATURE 0 120 240 360 480 600 720 840 960 1080 1200 1320 1440 1560 1680 1800 TIME (seconds) Cabinet Dimensions 32.20in [818mm] 20.00in [508mm] 32.20in [818mm] 28.00in [711mm] XXX VOLTS XXX VOLTS XXX VOLTS by by WARNING HAZARDOUS VOLTAGE. Contact may cause electric shock or burn. Turn off and lock out systems before servicing. FIGURE A: 24kW - 78kW HEATER CABINET (For standard 380V-600V models) 47.00in [1194mm] 41.26in [1048mm] 86.12in [2187mm] by by WARNING HAZARDOUS VOLTAGE. Contact may cause electric shock or burn. Turn off and lock out systems before servicing. FIGURE B: 90kW - 156kW HEATER CABINET (For standard 380V-600V models) 86.12in [2187mm] WARNING WARNING HAZARDOUS VOLTAGE. Contact may cause electric shock or burn. Turn off and lock out systems before servicing. HAZARDOUS VOLTAGE. Contact may cause electric shock or burn. Turn off and lock out systems before servicing. FIGURE C: 157kW - 312kW HEATER CABINET (For standard 380V-600V models) 86.12in [2187mm] 7010 LINDSAY DRIVE MENTOR, OHIO 44060 ♦ USA PHONE: (1) 440-974-1300 FAX: (1) 440-974-9561 USA/CAN: 800-621-1998 CERTIFIED TO ISO 9001:2008, WITH DESIGN WWW.PROCESSTECHNOLOGY.COM